DFT calculations of photoabsorption spectra for alicyclic and heterocyclic compounds in the VUV region

Journal of Photopolymer Science and Technology

Volumn 16, Issue 4, 2003, Pages 537-544

  Ando, Shinji ^a   Ueda, Mitsuru ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Photoabsorption spectra; Photoresist materials; Time dependent density functional theory; Transition energy; VUV lithography

Indexed keywords

ADAMANTANE DERIVATIVE; ALICYCLIC COMPOUND; CUBANE DERIVATIVE; ESTER; GAMMA LACTONE DERIVATIVE; HETEROCYCLIC COMPOUND; LACTONE DERIVATIVE; NORBORNANE DERIVATIVE; OCTANE; POLYMER;

ANALYTIC METHOD; ARTICLE; CALCULATION; CHEMICAL MODEL; CHEMICAL STRUCTURE; DENSITY; FLUORINATION; FUNCTIONAL ASSESSMENT; LIGHT ABSORPTION; POLYMERIZATION; PREDICTION; SPECTRUM; STRUCTURE ANALYSIS; THEORY; TIME; ULTRAVIOLET RADIATION; VACUUM;

EID: 0037830825     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.16.537     Document Type: Article

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