Density functional theory calculations of photoabsorption spectra of organic molecules in the vacuum ultraviolet region

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 41, Issue 2 A, 2002, Pages

  Ando, Shinji ^a   Fujigaya, Tsuyohiko ^a   Ueda, Mitsuru ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Photoabsorption spectra; Photoresist materials; Time dependent density functional theory; Transition energy; VUV lithography

Indexed keywords

LIGHT ABSORPTION; OPTIMIZATION; PHOTORESISTS; PROBABILITY DENSITY FUNCTION; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS; ULTRAVIOLET RADIATION; VACUUM;

DENSITY FUNCTIONAL THEORY (DFT); ORGANIC MOLECULES; PHOTOABSORPTION SPECTRA;

MOLECULAR PHYSICS;

EID: 0036478524     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.L105     Document Type: Article

References (12)