SCOPUS 정보 검색 플랫폼

Journal of Photopolymer Science and Technology

Volumn 15, Issue 4, 2002, Pages 643-654

A new photoresist material for 157 nm lithography-2

(7) Fujigaya, T a Ando, S a Shibasaki, Y a Kishimura, S b Endo, M b Sasago, M b Ueda, M a

a TOKYO INSTITUTE OF TECHNOLOGY (Japan)

b PANASONIC CORPORATION (Japan)

Author keywords

157 nm lithography; Chemically amplified photoresist; Photoacid generator; Poly(alkyl vinyl sulfonate)s

Indexed keywords

4 (1,1,1,3,3,3 HEXAFLUORO 2 HYDROXYPROPYL)STYRENE; NITRILE; POLY(2,2,2 TRIFLUOROETHYLVINYL SULFONATE); POLY(METHYLVINYL SULFONATE); POLYMER; STYRENE DERIVATIVE; SULFONIC ACID DERIVATIVE; UNCLASSIFIED DRUG;

ARTICLE; DENSITY; GLASS TRANSITION TEMPERATURE; LITHOGRAPHY; MOLECULAR WEIGHT; PHOTOACID GENERATOR; PHOTOLYSIS; POLYMERIZATION; PROTON NUCLEAR MAGNETIC RESONANCE; SOLUBILITY; TECHNOLOGY; ULTRAVIOLET RADIATION; VACUUM;

EID: 0036361950 PISSN: 09149244 EISSN: None Source Type: Journal
DOI: 10.2494/photopolymer.15.643 Document Type: Article

Times cited : (18)

References (37)

1
- 0001606297
- (2002) Polym. Mater. Sc. Eng A.C.S. , vol.86 , Issue.1 , pp. 148
- Fujigaya, T.¹ Shibasaki, Y.² Ueda, M.³ Kishimura, S.⁴ Endo, M.⁵ Sasago, M.⁶

2
- 85036964082
- (2002) Jpn. J. Appl. Phys. , vol.41
- Ando, S.¹ Fujigaya, T.² Ueda, M.³

3
- 0034763292
- (2001) Proc. SPIE , vol.4345 , pp. 296
- Fedynyshyn, T.H.¹ Kunz, R.R.² Sinta, R.³ Sworin, M.⁴ Mowers, W.A.⁵ Goodman, R.B.⁶ Doran, S.P.⁷

4
- 0010253449
- (2000) J. Vac. Sci. Technol. , vol.B , pp. 18
- Fedynyshyn, T.H.¹ Kunz, R.R.² Sinta, R.³ Goodman, R.B.⁴ Doran, S.P.⁵

5
- 0010275217
- (1945) J. Chem. Soc. , pp. 464
- Goldberg, A.A.¹

6
- 0020778941
- (1984) J. Macromol. Sci. Chem. , vol.A21 , Issue.8-9 , pp. 1181
- Pearce, E.M.¹ Kwei, T.K.² Min, B.Y.³

7
- 0010223173
- (1992) Tetrahedron , vol.48 , pp. 39
- Miethchen, R.¹ Rentsch, D.² Stoll, N.³

8
- 0010277628
- in press
- (2002) J. Photopolym. Sci. Technol.
- Ando, S.¹ Fujigaya, T.² Ueda, M.³

9
- 0002652977
- (1969) Synthesis , vol.1 , pp. 3
- Gilbert, E.E.¹

10
- 0010225376
- (1965) Angew. Che. Int. Ed. , vol.4 , pp. 4
- Distler, H.¹

11
- 0001405171
- (1946) J. Am. Chem. Soc. , vol.68 , pp. 1797
- Whitmore, W.F.¹ Landau, E.F.²

12
- 0010275218
- (1976) J. Chem. Soc., Chem. Comm. , pp. 1012
- King, J.F.¹ Loosmore, S.M.²

13
- 0003161990
- (1975) Acc. Chem. Res. , vol.8 , pp. 10
- King, J.F.¹

14
- 37049097595
- (1979) J. Chem. Soc., Chem. Chomm. , pp. 454
- King, J.F.¹ Hillhouse, J.H.²

15
- 0000314981
- (1982) J. Am. Chem. Soc. , vol.104 , pp. 7108
- King, J.F.¹ Loosmore, S.M.² Aslam, M.³ Lock, J.D.⁴ McGarrity, M.J.⁵

16
- 0021749381
- (1984) Can. J. Chem. , vol.62 , pp. 1977
- King, J.F.¹ Hillhouse, J.H.² Skonieczny, S.³

17
- 0010250689
- (1988) Can. J. Chem. , vol.66 , pp. 1109
- King, J.F.¹ Hillhouse, J.H.² Lauriston, T.M.³

18
- 0010226127
- (1989) Can. J. Chem. , vol.67 , pp. 330
- King, J.F.¹ Loosmore, S.M.² Hillhouse, J.H.³ Khemani, K.C.⁴

19
- 0001004167
- (1970) J. Am. Chem. Soc. , vol.92 , pp. 1660
- Ree, B.R.¹ Martin, J.C.²

20
- 0001350936
- (1961) J. Am. Chem. Soc. , vol.83 , pp. 2700
- Schleyer, P.R.¹ Nicholas, R.D.²

21
- 0000178252
- (1952) J. Am. Chem. Soc. , vol.74 , pp. 1147
- Winstein, S.¹ Trifan, D.²

22
- 0001599129
- (1952) J. Am. Chem. Soc. , vol.74 , pp. 1154
- Winstein, S.¹ Trifan, D.²

23
- 0000566093
- (1965) J. Am. Chem. Soc. , vol.87 , pp. 375
- Schleyer, P.R.¹ Donaldsoon, M.M.² Watts, W.E.³

24
- 0000532281
- (1965) J. Am. Chem. Soc. , vol.87 , pp. 376
- Winstein, S.¹ Clipinger, E.² Howe, R.³ Vogllfanger, E.⁴

25
- 0010250690
- (1965) J. Am. Chem. Soc. , vol.87 , pp. 378
- Colter, A.¹ Friedrich, E.C.² Holness, N.J.³ Winstein, S.⁴

26
- 0010222513
- (1965) J. Am. Chem. Soc. , vol.87 , pp. 379
- Howe, R.¹ Friedrich, E.C.² Winstein, S.³

27
- 0010222514
- (1965) J. Am. Chem. Soc. , vol.87 , pp. 381
- Winstein, S.¹

28
- 0010225377
- (1978) J. Am. Chem. Soc. , vol.100 , pp. 3143
- Brown, H.C.¹ Ravindranthan, M.² Chloupek, F.J.³ Rothberg, I.⁴

29
- 0000942206
- (1947) J. Polym. Sci. , vol.2 , pp. 101
- Alfrey, T.¹ Price, C.C.²

30
- 0020161551
- (1982) J. of Polym. Sci., Polym. Chem. Ed. , vol.20 , pp. 1745
- Borchardt, J.K.¹ Dalrymple, E.D.²

31
- 0000087520
- (1978) Macromolecules , vol.11 , pp. 839
- Herman, J.J.¹ Teyssie, Ph.²

32
- 0010249837
- (1950) J. Am. Chem. Soc. , vol.72 , pp. 4864
- Overberger, C.G.¹ Baldwin, D.E.² Gregor, H.P.³

33
- 0002285078
- (1950) J. Am. Chem. Soc. , vol.72 , pp. 14
- Price, C.C.¹ Zomlefer, J.²

34
- 1542587019
- (1991) Chem. Rev. , vol.91 , pp. 1625
- Creary, X.¹

35
- 0000134265
- (1981) J. Am. Chem. Soc. , vol.103 , pp. 3863
- Jansen, M.P.¹ Koshy, K.M.² Mangru, N.N.³ Tidwell, T.T.⁴

36
- 0001202234
- (1982) J. Am. Chem. Soc. , vol.104 , pp. 207
- Allen, A.D.¹ Jansen, M.P.² Kosy, K.M.³ Mangru, N.N.⁴ Tidwell, T.T.⁵

37
- 0000883521
- (1994) J. Org. Chem. , vol.59 , pp. 8157
- Nelson, D.W.¹ O'Reilly, N.J.² Speier, J.³ Gassman, P.G.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.