Micro pinball game demonstrating an easy MEMS transfer process using room temperature plasma bonding

Journal of Micromechanics and Microengineering

Volumn 13, Issue 4, 2003, Pages

  Bring, Martin ^a   Sanz Velasco, Anke ^a   Rödjegård, Henrik ^b   Enoksson, Peter ^c  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b Inst Microelectron Goteborg   (Sweden)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

DRY ETCHING; ELECTROSTATICS; MICROMACHINING; PLASMA APPLICATIONS;

MICRO PINBALL GAME;

MICROELECTROMECHANICAL DEVICES;

EID: 0037765115     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/4/308     Document Type: Conference Paper

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