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Volumn 530, Issue 1-2, 2003, Pages 17-25
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Effects of nitrogenmonoxide on 4H-SiC(0 0 0 1)
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Author keywords
Nitrides; Nitrogen oxides; Oxidation; Silicon; Silicon carbide
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Indexed keywords
CHEMICAL BONDS;
INTERFACES (MATERIALS);
OXIDATION;
SILICON CARBIDE;
SUBSTRATES;
SURFACE STRUCTURE;
SILICON OXY-NITRIDES;
NITROGEN OXIDES;
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EID: 0037457527
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(03)00389-3 Document Type: Article |
Times cited : (8)
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References (26)
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