Selective desorption of interfacial SiO2

Applied Physics Letters

Volumn 82, Issue 10, 2003, Pages 1580-1582

  Copel, M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; DESORPTION; INTERFACES (MATERIALS); PYROLYSIS; REACTION KINETICS; SILICATES; SURFACE CHEMISTRY; THERMAL EFFECTS; VAPORIZATION;

MEDIUM-ENERGY ION SCATTERING (MEIS);

SILICA;

EID: 0037429880     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1559647     Document Type: Article

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