Comparative measurements of the piezoelectric coefficient of a lead zirconate titanate film by piezoresponse force microscopy using electrically characterized tips

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 2, 2003, Pages 916-918

  Lin, Heh Nan ^a   Chen, Sy Hann ^b   Ho, Shu Te ^a   Chen, Ping Ren ^a   Lin, I Nan ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; ELECTRODES; GOLD; LEAD COMPOUNDS; MICROSCOPIC EXAMINATION;

PIEZOELECTRIC COEFFICIENT;

PIEZOELECTRICITY;

EID: 0037279443     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1562644     Document Type: Article

References (16)

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15. The DS345 panel reading is for a 50 Ω input and the actual voltage (as described in this work) between the tip and the bottom electrode is doubled.
16. A linear piezoresponse versus voltage curve due to cantilever-sample capacitive force has been observed with the use of a probe with a spring constant of 0.1 N/m in Ref. 11.