SCOPUS 정보 검색 플랫폼

Volumn 409, Issue 2, 2002, Pages 178-184

The effect of pressure control on a thermally stable a-C:N thin film with low dielectric constant by electron cyclotron resonance-plasma

(4) Liu, X W a Lin, J H a Jong, W J a Shih, H C a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

Amorphous materials; Carbon; Dielectric properties; X Ray photoelectron spectroscopy

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CARBON NITRIDE; CHEMICAL BONDS; COMPOSITION; CROSSLINKING; ELECTRON CYCLOTRON RESONANCE; ELECTRONIC PROPERTIES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PERMITTIVITY; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; THERMODYNAMIC STABILITY; X RAY PHOTOELECTRON SPECTROSCOPY;

FIELD EMISSION-SCANNING ELECTRON MICROSCOPY (FE-SEM);

THIN FILMS;

EID: 0037197368 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(02)00146-3 Document Type: Article

Times cited : (11)

References (36)

1
- 0029547914
- (1995) Tech. Dig. Int. Electron Devices Meet. , pp. 241
- Bohr, M.¹

2
- 0031256176
- (1997) Mater. Res. Bull. , vol.22 , pp. 19
- Lee, W.¹ Ho, P.²

3
- 84975376938
- (1993) J. Electrochem. Soc. , vol.140 , pp. 687
- Homma, T.¹ Yamaguchi, R.² Murao, Y.³

4
- 0346156338
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 408
- Ussami, T.¹ Shimokawa, K.² Yoshimaru, M.³

5
- 0027590474
- (1993) Macromolecules , vol.26 , pp. 2779
- Fering, A.E.¹ Auman, B.C.² Wonchoda, E.R.³

6
- 0025416332
- (1990) Polymer , vol.31 , pp. 312
- Resnick, P.R.¹

7
- 0040400378
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2864
- Endo, K.¹ Shinoda, K.² Tatsumi, T.³

8
- 0001295231
- (1999) Appl. Phys. Lett. , vol.86 , pp. 2739
- Endo, K.¹ Shinoda, K.² Tatsumi, T.³

9
- 0000620314
- (1996) Appl. Phys. Lett. , vol.68 , pp. 3656
- Endo, K.¹ Tatsumi, T.²

10
- 0001519427
- (1999) Appl. Phys. Lett. , vol.74 , pp. 197
- Sung, S.L.¹ Tsai, S.H.² Tseng, C.H.³ Liu, X.W.⁴ Shih, H.C.⁵

11
- 0034142461
- (2000) J. Mater. Res. , vol.15 , Issue.2 , pp. 502
- Sung, S.L.¹ Tsai, S.H.² Liu, X.W.³ Shih, H.C.⁴

12
- 0032687103
- (1999) Thin Solid Films , vol.340 , pp. 169
- Sung, S.L.¹ Tseng, C.H.² Guo, X.J.³ Chiang, F.K.⁴ Liu, X.W.⁵ Shih, H.C.⁶

13
- 0033704232
- (2000) Mater. Lett. , vol.44 , pp. 304
- Liu, X.W.¹ Lin, J.H.² Chao, L.T.³ Shih, H.C.⁴

14
- 26444594415
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 1840
- Liu, X.W.¹ Tsai, S.H.² Lee, L.C.³ Yang, M.X.⁴ Yang, A.C.M.⁵ Lin, I.N.⁶ Shih, H.C.⁷

15
- 0037580660
- (1996) MRS Bull. , vol.21 , pp. 59
- Jaskie, J.E.¹

16
- 0031572023
- (1997) Appl. Phys. Lett. , vol.71 , pp. 1477
- Silva, S.R.P.¹ Amaratunga, G.A.J.² Barnes, J.R.³

17
- 0030563588
- (1996) J. Non-Cryst. Solids , vol.198-200 , pp. 611
- Amaratunga, G.A.J.¹ Silva, S.R.P.²

18
- 0035148712
- (2001) Surf. Coat. Technol , vol.135 , pp. 184-187
- Liu, X.W.¹ Tseng, C.H.² Lin, J.H.³ Shih, H.C.⁴

19
- 0038552612
- (1997) Appl. Phys. Lett. , vol.71 , pp. 2253
- Groning, O.¹ Kuttel, O.M.² Groning, P.³ Schlapbach, L.⁴

20
- 0001083256
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 431
- Park, K.C.¹ Moon, J.H.² Chang, S.J.³ Jang, J.H.⁴

21
- 0035500527
- (2001) J. Mater. Chem. Phys. , vol.72 , Issue.2 , pp. 258
- Liu, X.W.¹ Lin, J.H.² Tseng, C.H.³ Shih, H.C.⁴

22
- 0000684514
- (1999) Science , vol.286 , pp. 422
- Miller, R.D.¹

23
- 0032608058
- (1999) Diamond Relat. Mater. , vol.8 , pp. 440
- Iwasaki, T.¹ Aono, M.² Nitta, S.³ Habuchi, H.⁴ Itoh, T.⁵ Nonomura, S.⁶

24
- 0032068757
- (1998) J. Non-Cryst. Solids , vol.227 , pp. 650
- Yoshida, S.¹ Itoh, T.² Takada, N.³ Nitta, S.⁴ Nonomura, S.⁵

25
- 0032066994
- (1998) J. Non-Cryst. Solids , vol.227 , pp. 655
- Nitta, S.¹ Takada, N.² Sugiyama, K.³ Itoh, T.⁴ Nonomura, S.⁵

26
- 0034187085
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 1773
- Aono, M.¹ Nitta, S.² Katsuno, T.³ Iuchi, T.⁴

27
- 0006113778
- (2000) J. Non-Cryst. Solids , vol.266 , pp. 825
- Itoh, T.¹ Aono, M.² Yoshida, S.³ Hattori, S.⁴ Katsuno, T.⁵ Nitta, S.⁶ Nonomura, S.⁷

28
- 0034205906
- (2000) Appl. Surf. Sci. , vol.159 , pp. 341
- Aono, M.¹ Nitta, S.² Katsuno, T.³ Iuchi, T.⁴ Nonomura, S.⁵

29
- 85084724763
- (1999) Mater. Res. Soc. Symp. Proc. , vol.565 , pp. 422
- Aono, M.¹ Nitta, S.² Iwasaki, T.³ Yokoi, H.⁴ Itoh, T.⁵ Nonomura, S.⁶

30
- 0033725911
- (2000) J. Non-Cryst. Solids , vol.271 , pp. 147
- Yokomichi, H.¹ Masuda, A.²

31
- 12044253618
- (1994) Phys. Rev. Lett. , vol.73 , pp. 118
- Marton, D.¹ Boyd, K.J.² Al-Bayati, A.H.³ Todorov, S.S.⁴ Rabalaais, J.W.⁵

32
- 0031186143
- (1997) Thin Solid Films , vol.304 , pp. 183
- Taki, Y.¹ Kitagawa, T.² Takai, O.³

33
- 4243363393
- (1984) Phys. Rev. B , vol.30 , pp. 870
- Beeman, D.¹ Silverman, J.² Lynds, R.³ Anderson, M.R.⁴

34
- 37049138096
- (1973) J. Chem. Soc. Faraday Trans. II , vol.69 , pp. 551
- Barber, M.¹ Connor, J.A.² Guest, M.F.³ Hillier, I.H.⁴ Schwarz, M.⁵ Stacey, M.⁶

35
- 0344124690
- (1970) Phys. Scr. , vol.2 , pp. 70
- Gelius, U.¹ Heden, R.F.² Hedman, J.³ Lindberg, B.J.⁴ Manne, R.⁵ Nordberg, R.⁶ Nordling, R.⁷ Siegbahn, K.⁸

36
- 0001102174
- (1993) Phys. Rev. B , vol.47 , pp. 10201
- Mansour, A.¹ Ugolini, D.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.