Characterization of nitrogen in a-CNx thin films by gas effusion spectroscopy

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 1, 1998, Pages 650-654

  Yoshida, Shigeru ^a   Itoh, Takashi ^a   Takada, Naoyuki ^a   Nitta, Shoji ^a   Nonomura, Shuichi ^a  

^a GIFU UNIVERSITY   (Japan)

Author keywords

Amorphous CNx films; Gas effusion spectroscopy; Nitrogen

Indexed keywords

HYDROGEN; NITROGEN; PLASMAS; SPECTROSCOPIC ANALYSIS; THIN FILMS; ULTRAVIOLET RADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

GAS EFFUSION SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 0032068757     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00137-9     Document Type: Article

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