Diffusion induced amorphization in the crystalline SrTiO 3 thin films grown on Si (1 0 0) investigated by combinatorial method

Applied Surface Science

Volumn 189, Issue 3-4, 2002, Pages 307-312

  Ahmet, Parhat ^a   Koida, Takashi ^b   Takakura, Masahiro ^b   Nakajima, Kiyomi ^b   Yoshimoto, Mamoru ^b   Koinuma, Hideomi ^a,b   Tanaka, Miyoko ^a   Takeguchi, Masaki ^a   Chikyow, Toyohiro ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Amorphization; Combinatorial; Diffusion; Interface; Si; SrTiO 3

Indexed keywords

AMORPHIZATION; CRYSTALLINE MATERIALS; DIFFUSION IN SOLIDS; ELECTRON ENERGY LOSS SPECTROSCOPY; INTERFACES (MATERIALS); PULSED LASER DEPOSITION; SILICON; STRONTIUM COMPOUNDS; SUBSTRATES; THIN FILMS;

COMBINATORIAL METHOD;

FILM GROWTH;

EID: 0037188081     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)01008-X     Document Type: Conference Paper

References (18)