Ion-assisted deposition of silver thin films

Thin Solid Films

Volumn 359, Issue 1, 2000, Pages 95-97

  Lee, Cheng Chung ^a   Lee, Ta Yuan ^a   Jen, Yi Jun ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DEPOSITION; HARDNESS TESTING; ION BOMBARDMENT; LIGHT REFLECTION; OPTICAL FILMS; REFRACTIVE INDEX; SILVER; SURFACE ROUGHNESS; TENSILE STRESS; THIN FILMS;

ION-ASSISTED DEPOSITION;

METALLIC FILMS;

EID: 0033883135     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00736-1     Document Type: Article

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