Vacuum arc deposited boron carbide films for fusion plasma facing components

Fusion Technology

Volumn 39, Issue 2, 2001, Pages 910-915

  Klepper, C C ^a   Niemel, J ^a   Hazelton, R C ^a   Yadlowsky, E J ^a   Monteiro, O R ^b  

^a HY Tech Research Corporation   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; BORON CARBIDE; COATINGS; DEPOSITION; STOICHIOMETRY; THERMAL CONDUCTIVITY; VACUUM;

PLASMA FACING COMPONENTS; VACUUM ARC DEPOSITION;

FUSION REACTORS;

EID: 0035269478     PISSN: 07481896     EISSN: None     Source Type: Journal    
DOI: 10.13182/fst01-a11963356     Document Type: Article

References (31)

1. Handbook of Vacuum Arc Science and Technology: Fundamentals and Applications, P.J. Martin, D.M. Sanders, R.L. Boxman, editors, Noyes Publications, Park Ridge, NJ, U.S.A. (1995).
2. Ian G. Brown, "Cathodic Arc Deposition of Films," Annu. Rev. Mater. Sci., 28, p. 243-69 (1998).
3. O.R. Monteiro, Z. Wang, P.Y. Hou, I.G. Brown, "Synthesis of multi-element thin films using mixed metal plasma streams," Nuclear Instruments and Methods in Physics Research B, 127/128, p. 821-26 (1997).
4. O.R. Monteiro, Z. Wang, I.G. Brown, "Deposition of mullite and mullite-like coatings on silicon carbide by dual-source metal plasma immersion," J. Mater. Res., 12, 9, p. 2401-10 (1997).
5. M-P. Delplancke-Ogletree, O.R. Monteiro, "Deposition of titanium carbide films from mixed carbon and titanium streams," J. Vac. Sci. Technol., A 15, 4, p. 1943-50 (1997).
6. M-P. Delplancke-Ogletree, O.R. Monteiro, and I.G. Brown, "Preparation of TiC and TiC/DLC multilayers by MEPIIID: Relationship between composition, microstructure and wear properties," Proceeding of the Materials Research Society, DE Alexander et.al., p. 639-44, Symposium, Pittsburgh (1997).
7. M.M. Bilek, P.J. Martin and D.R. Mackenzie, "Influence of gas pressure & cathode composition on ion energy distributions in filtered cathodic vacuum arcs," J. Appl. Phys., 83, 6, p. 2965-70 (1998).
8. W.K. Grant, C. Loomis, J.J. Moore, D.L. Olson, B. Mishra and A.J. Perry, "Characterization of hard chromium nitride coatings deposited by cathodic arc vapor deposition," Surf. Coatings Technol., 86-87, 1-3, pt.2, p. 788-96 (1996).
9. S. Anders and A. Anders, "On Modes of Arc Cathode Operation," IEEE Transactions on Plasma Science, 19, 1, p. 20-24 (1991).
10. M.M.M. Bilek, W.I. Milne, "Electronic properties and impurity levels in filtered cathodic vacuum arc (FCVA) amorphous silicon," Thin Solid Films, 308-309, p. 79-84 (1997).
11. M.M.M. Bilek, W.I. Milne, "Filtered cathodic vacuum arc (FCVA) deposition of thin film silicon," Thin Solid Films, 290-291, p. 299-304 (1996).
12. D. Arbilly, R.L. Boxman, et.al., "Amorphous Si thin films prepared by vacuum arc deposition," Thin Solid Films, 253, p. 62-6 (1994).
13. th SEDE BOQUER Symposium on solar electricity production, D. Faiman, 3-5, p. 215-18 (1997).
14. F. Richter, G. Krannich, J. Hahn et.al., "Filtered cathodic arc evaporation source with a heated boron cathode," Surf. Coat. Technol., 90, p. 178 (1997).
15. F. Richter, S. Peter, V.B. Filippov et.al., "Characteristics of the cathode arc discharge with a hot boron cathode," IEEE Transactions on Plasma Science, 27, 4, p. 1079-83 (1999).
16. Tore Supra Team, "Toward Long Pulse, High-Performance Discharges in Tore Supra: Experimental Knowledge and Technological Developments for Heat Exhaust," Fusion Technology, 29, p. 417-48 (1996).
17. R. Causey, SNLL, Priv. Comm., 8/2000.
18. O.I. Buzhinskij, Yu.M. Semenets, "Thick boron carbide coatings for protection of tokamak first wall and divertor," Fusion Engineering and Design, 45, 4, p. 343-60 (1999).
19. H. Shinno, T. Tanabe, M. Fujitsuka, Y. Sakai, "Characterization of carbon-boron coatings prepared on molybdenum by a vacuum arc deposition method," Thin Solid Films, 189, p. 149-59 (1990).
20. th Symposium on Fusion Technology, Part 1, p. 197-202, Elsevier, Amsterdam (1997).
21. R.G. Castro, Priv. Comm., 8/2000
22. 2 impact," Journal of Nuclear Materials, 128 & 129, p. 593-96 (1984).
23. J. Roth, "Chemical sputtering and radiation enhanced sublimation of carbon," Physics of Plasma-Wall Interactions in Controlled Fusion, D.E. Post and R. Behrisch, p. 389-411, Plenum Press, New York (1986).
24. A. Anders, "Approaches to rid cathodic arc plasmas of macro and nanoparticles: A Review," Surface & Coatings Technology, 120-121, p. 319-30 (1999).
25. O.R. Monteiro, C.C. Klepper, J. Schneider, J. Niemel, et.al., "Boron carbide coatings prepared by vacuum arc deposition," submitted to the Journal of Vacuum Science Technology (October 2000).
26. A.J. Bullen, K.E. O'Hara, D.G. Cahill, O.R. Monteiro and A. von Keudell, "Thermal conductivity of amorphous carbon thin films", J. Appl. Phys., 88, 11, p. 6317-20 (2000).
27. S. Ulrich, H. Ehrhardt, J. Schwan, R. Samlenski and R. Brenn, "Subplanation effect in magnetron sputtered superhand boron carbide thin films," Diamond and Related Materials, 7, p. 835-38 (1998).
28. T. Hu, L. Steihl, W. Rafaniello, T. Fawcett, D.D. Hawn, J.G. Mashall, S.J. Rozeveld, C.L. Putzig, J.H. Blackson, W. Cermignani, M.G. Robinson, "Structures and properties of disorder boron carbide coatings generated by magnetron sputtering," Thin Solid Films, 332, p. 80-6 (1998).
29. C.E. Thomas Jr. et al., "ICRF/Edge Interaction Guidelines for ICRF Antenna Design and Initial ICRF/Edge Interaction Experiments on the Tore Supra Tokamak," Fusion Technology, 30, 1, p. 1-39 (1996).
30. J.H. Harris et al., "Plasma-surface interactions with ICRF antennas and lower hybrid grills in Tore Supra," Journal of Nuclear Materials, 241-243, p 511-16 (1997).
31. M. Ulrickson, SNLA, Priv. Comm. 8/2000.