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Materials Science and Engineering: A

Volumn 336, Issue 1-2, 2002, Pages 75-80

Influence of temperature and ion kinetic energy on surface morphology of CeO2 films prepared by dual plasma deposition

(5) Wang, L P a,b Fu, K Y a Tian, X B a Tang, B Y a,b Chu, P K a

a CITY UNIVERSITY OF HONG KONG (Hong Kong)

b HARBIN INSTITUTE OF TECHNOLOGY (China)

Author keywords

Cerium; Plasma processing and deposition; Surface roughness

Indexed keywords

DEPOSITION; ELECTRIC POTENTIAL; KINETIC ENERGY; SUBSTRATES; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

ION IMPACT ENERGY;

MORPHOLOGY;

DEPOSITION; FILM; KINETICS; MORPHOLOGY; SURFACE PROPERTY; TEMPERATURE EFFECT;

EID: 0037175060 PISSN: 09215093 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5093(01)01923-2 Document Type: Article

Times cited : (16)

References (18)

1
- 0032118059
- (1998) Mat. Chem. Phys , vol.54 , pp. 234
- Insepov, Z.¹ Yamada, I.² Sosnowske, M.³

2
- 0000052564
- (1997) Appl. Phys. Lett , vol.71 , pp. 2800
- Makeev, M.A.¹ Barabas, A.-L.²

3
- 36449001554
- (1996) Appl. Phys. Lett , vol.68 , pp. 238
- Ni, W.X.¹ Hansson, G.V.² Buyanova, I.A.³ Henry, A.⁴ Chen, W.M.⁵ Momemar, B.⁶

4
- 0032496509
- (1998) Thin Solid Films , vol.322 , pp. 177
- Carter, G.¹

5
- 0030288186
- (1996) Mat. Sci. Eng.: Reports , vol.17 R , pp. 207
- Chu, P.K.¹ Qin, S.² Chan, C.³ Cheung, N.W.⁴ Larson, L.A.⁵

6
- 0042633781
- (1987) J. Appl. Phys , vol.62 , pp. 4591
- Conrad, J.R.¹ Radtke, J.L.² Dodd, R.A.³ Worzala, F.J.⁴ Tran, N.C.⁵

7
- 0001213453
- (2000) Rev. Sci. Instrum , vol.71 , pp. 4435
- Wang, L.P.¹ Gan, K.Y.² Tian, X.B.³ Tang, B.Y.⁴ Chu, P.K.⁵

8
- 0033467269
- (1999) J. Vac. Sci. Technol. A , vol.17 , Issue.6 , pp. 3255
- Tian, X.B.¹ Zhang, T.² Zeng, Z.M.³ Tang, B.Y.⁴ Chu, P.K.⁵

9
- 0033581052
- (1999) Surf. Coatings Technol , vol.115 , pp. 234
- Zeng, Z.M.¹ Zhang, T.² Tang, B.Y.³ Tian, X.B.⁴ Chu, P.K.⁵

10
- 0000968807
- (1997) Rev. Sci. Instrum , vol.68 , pp. 1866
- Chu, P.K.¹ Tang, B.Y.² Cheng, Y.C.³ Ko, P.K.⁴

11
- 0034784139
- (2001) J. Mat. Sci. Tech , vol.17 , pp. 29
- Wang, L.P.¹ Tang, B.Y.² Tian, X.B.³ Leng, Y.X.⁴ Zhang, Q.Y.⁵ Chu, P.K.⁶

12
- 0035973433
- (2001) Mat. Sci. Eng , vol.308 A , pp. 176
- Wang, L.P.¹ Tang, B.Y.² Huang, N.³ Tian, X.B.⁴ Chu, P.K.⁵

13
- 0035507403
- (2001) J. Vac. Sci. Technol. A , vol.19 , Issue.6 , pp. 2851
- Wang, L.P.¹ Tang, B.Y.² Gan, K.Y.³ Tian, X.B.⁴ Chu, P.K.⁵

14
- 0003969707
- Cambridge University Press, UK
- (1998) Physics of Crystal Growth
- Pimpinelli, A.¹ Villain, J.²

15
- 0000170590
- (1999) Phys. Rev. E , vol.99 , pp. 803
- Golovin, A.A.¹ Davis, S.H.² Nepomnyashchy, A.A.³

16
- 0032595796
- (1999) Surf. Interface Anal , vol.27 , pp. 950
- Shimizu, K.¹ Habazaki, H.² Skeldon, P.³ Thompso, G.E.⁴ Wood, G.C.⁵

17
- 0001493352
- (1992) J. Appl. Phys , vol.71 , pp. 5926
- Okuno, S.N.¹ Hashimoto, S.² Inomata, K.³

18
- 0031258974
- (1997) Mat. Chem. Phys , vol.50 , pp. 209
- Stefanov, P.¹ Stanchev, A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.