Dynamic mixing deposition/implantation in a plasma immersion configuration

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 6, 1999, Pages 3255-3259

  Tian, X B ^a,b   Zhang, T ^a   Zeng, Z M ^a   Tang, B Y ^a   Chu, P K ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033467269     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582051     Document Type: Article

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