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Materials Chemistry and Physics

Volumn 54, Issue 1-3, 1998, Pages 234-237

Sputterring and smoothing of metal surface with energetic gas cluster beams

(3) Insepov, Z a Yamada, I a Sosnowski, M b

a KYOTO UNIVERSITY (Japan)

b NEW JERSEY INSTITUTE OF TECHNOLOGY (United States)

Author keywords

Cluster ions; Impact; Molecular dynamics; Surface morphology

Indexed keywords

ARGON; ATOMS; COMPUTER SIMULATION; COPPER; FINITE DIFFERENCE METHOD; ION BEAMS; ION BOMBARDMENT; IONS; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; MORPHOLOGY; SURFACES;

CLUSTER ATOM; CLUSTER ION; GAS CLUSTER; KURAMOTO-SIVASHINSKY EQUATION; MOLECULAR DYNAMIC SIMULATION; SURFACE SMOOTHING;

SPUTTERING;

EID: 0032118059 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/S0254-0584(98)00032-7 Document Type: Article

Times cited : (37)

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