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Thin Solid Films

Volumn 322, Issue 1-2, 1998, Pages 177-187

Surface roughening during ion-assisted film deposition

(1) Carter, G a

a UNIVERSITY OF SALFORD (United Kingdom)

Author keywords

Film deposition; Ion irradiation; Surface roughening

Indexed keywords

DIFFUSION IN SOLIDS; FILM GROWTH; ION BOMBARDMENT; RADIATION EFFECTS; SPUTTER DEPOSITION; SURFACE ROUGHNESS;

ION ASSISTED FILM DEPOSITIONS;

FILM PREPARATION;

EID: 0032496509 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)01012-2 Document Type: Article

Times cited : (4)

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