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Volumn 18, Issue 6, 2000, Pages 3549-3551

Actuation and internal friction of torsional nanomechanical silicon resonators

Author keywords

[No Author keywords available]

Indexed keywords

INTERNAL FRICTION; MICROACTUATORS; NANOSTRUCTURED MATERIALS; RELAXATION PROCESSES; SILICON; THERMAL EFFECTS; TORSIONAL STRESS;

DEBYE RELAXATION; NANOMECHANICAL SILICON RESONATORS;

RESONATORS;

EID: 0034314868 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1313571 Document Type: Article

Times cited : (29)

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