Photo-electroforming: 3-D geometry and materials flexibility in a MEMS fabrication process

Journal of Microelectromechanical Systems

Volumn 8, Issue 2, 1999, Pages 161-171

  Tsao, Che Chih ^a   Sachs, Emmanuel ^b  

^a ACT Research Corp   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBIDES; ELECTROLESS PLATING; ETCHING; HEAT CONDUCTION; LASER APPLICATIONS; LAYERED MANUFACTURING; MASS TRANSFER; MICROELECTROMECHANICAL DEVICES; THERMAL EFFECTS;

LASER ENHANCED PLATING; MICROELECTROMECHANICAL SYSTEMS; PHOTO ELECTROFORMING;

ELECTROFORMING;

EID: 0033149623     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.767112     Document Type: Article

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