Photoforming applied to fine machining

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 173-178

  Takagi, Tarou ^a   Nakajima, Naomasa ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MACHINING; MASKS; PHOTOCHEMICAL REACTIONS; PHOTORESISTS;

FINE MACHINING; OPTICAL FORMING; PHOTOFORMING;

PHOTOLITHOGRAPHY;

EID: 0027146801     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)