Studies of reactive sputtering of multi-phase chromium nitride

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 2, 1997, Pages 248-252

  Nyberg, T ^a   Skytt, P ^a   Galnander B ^a   Nender, C ^a   Nordgren, J ^a   Berg, S ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031487433     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580520     Document Type: Article

References (19)

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