In situ scanning tunneling microscopy studies of the evolution of surface morphology and microstructure in epitaxial TiN(001) grown by ultra-high-vacuum reactive magnetron sputtering

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 403-408

  Karr, Brian W ^a   Petrov, I ^a   Desjardins, P ^a   Cahill, David G ^a   Greene, J E ^a  

^a United States of America   (United States)

Author keywords

Epitaxial titanium nitride; Reactive magnetron sputtering; Scanning tunneling microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL MICROSTRUCTURE; EPITAXIAL GROWTH; FILM GROWTH; MAGNESIA; MAGNETRON SPUTTERING; MORPHOLOGY; POLYCRYSTALLINE MATERIALS; SCANNING TUNNELING MICROSCOPY; SPUTTER DEPOSITION; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

ULTRAHIGH VACUUM REACTIVE MAGNETRON SPUTTERING;

TITANIUM NITRIDE;

EID: 0031248199     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00444-1     Document Type: Article

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