3D thermo-electro-mechanical simulations of gas sensors based on SOI membranes

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 297-300

  Lu, Chih Cheng ^a   Setiadi, D ^a   Udrea, F ^a   Milne, W I ^a   Covington, J A ^b   Gardner, J W ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

Device optimization; Electro thermal mechanical simulations; Multilayer membrane; SOI devices; Solid state gas sensors

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; FIELD EFFECT TRANSISTORS; OPTIMIZATION; PLATINUM; RELIABILITY; SILICA; STRESSES; THERMOELECTRICITY;

DEVICE OPTIMIZATION; ELECTRO-THERMAL-MECHANICAL SIMULATIONS; MULTILAYER MEMBRANES; SOI DEVICES; SOLID-STATE GAS SENSORS;

CHEMICAL SENSORS;

EID: 0001335392     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. J.W. Gardner, "Microsensors principles and applications", Wiley, 1994.
2. I. Lundstrom et al., "A hydrogen sensitive MOS field-effect transistor", Appl. Phys. Lett., 26, pp55-57, 1975.
3. A. Pike and J.W. Gardner, "Thermal modelling and characterisation of micropower chemoresistive silicon sensors", Sensors and Actuators, B, 45, pp19-26, 1997.
4. F. Udrea and J.W. Gardner, UK and World patent application GB2321336A and WO98/32009.
5. J.W. Gardner, F. Udrea, W.I. Milne, "Numerical simulation of a new generation of high-temperature, micropower and odour sensors based on SOI technology", Proc. of SPIE Smart Electronics and MEMS, Vol. 3673, pp104-112, March 1999.
6. S. Astie, A.M. Gue et al., "Optimization of an integrated SnO2 gas sensor using a FEM simulator", Sensors and Actuators, A, 69, pp205-211, 1998.
7. F. Udrea and J.W. Gardner, "Design of a silicon microsensor array device for gas analysis", Microelectronics Journal, 27, pp449-457, 1996.
8. D. Setiadi, F. Udrea et al, "3D numerical simulation of novel SOI MOSFET based gas sensors", Proc. of Chemical Sensors IV, The Electrochemical Soc., pp416-419, Oct. 1999.
9. ISE TCAD, "SOLIDIS-ISE 5.0 manual", Zurich, Switzerland, 1998.
10. S. Timoshenko and S. Woinowski-Krieger, "Theory of plates and shells", McGraw-Hill, pp13-20, 1959.