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Volumn 49, Issue 10, 2002, Pages 1729-1735

SILC dynamics in MOS structures subject to periodic stress

Author keywords

MOS capacitors; Nonvolatile memories; Oxide degradation; Reliability simulation; Stress induced leakage current (SILC)

Indexed keywords

OXIDE DEGRADATION; STRESS-INDUCED LEAKAGE CURRENT; TRAP ANNEALING; VOLTAGE STRESS;

EID: 0036773381     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2002.802671     Document Type: Article
Times cited : (14)

References (24)
  • 1
    • 0033190134 scopus 로고    scopus 로고
    • Reliability of thin dielectric for nonvolatile applications
    • A. Modelli, "Reliability of thin dielectric for nonvolatile applications," Microelectron. Eng., vol. 48, pp. 3-6, 1999.
    • (1999) Microelectron. Eng. , vol.48 , pp. 3-6
    • Modelli, A.1
  • 2
    • 0032097823 scopus 로고    scopus 로고
    • Degradation of thin tunnel gate oxide under constant fowler-nordheim current stress for a flash EEPROM
    • June
    • Y. B. Park and D. K. Schroder, "Degradation of thin tunnel gate oxide under constant Fowler-Nordheim current stress for a Flash EEPROM," IEEE Trans. Electron Devices, vol. 45, pp. 1361-1368, June 1998.
    • (1998) IEEE Trans. Electron Devices , vol.45 , pp. 1361-1368
    • Park, Y.B.1    Schroder, D.K.2
  • 4
    • 0030242886 scopus 로고    scopus 로고
    • Soft breakdown of ultra thin gate oxide layers
    • Sept.
    • M. Depas, T. Nigam, and M. H. Heynes, "Soft breakdown of ultra thin gate oxide layers," IEEE Trans. Electron Devices, vol. 43, pp. 1499-1501, Sept. 1996.
    • (1996) IEEE Trans. Electron Devices , vol.43 , pp. 1499-1501
    • Depas, M.1    Nigam, T.2    Heynes, M.H.3
  • 5
    • 0000267418 scopus 로고    scopus 로고
    • Stress-induced leakage current generation kinetics based on anode hole injection and hole dispersive transport
    • May
    • P. Riess, G. Ghibaudo, and G. Pananakakis, "Stress-induced leakage current generation kinetics based on anode hole injection and hole dispersive transport," J. Appl. Phys., vol. 87, p. 4626, May 2000.
    • (2000) J. Appl. Phys. , vol.87 , pp. 4626
    • Riess, P.1    Ghibaudo, G.2    Pananakakis, G.3
  • 6
    • 0032632269 scopus 로고    scopus 로고
    • Electric field and temperature dependence of the stress induced leakage current: Fowler-nordheim or schottky emission?
    • P. Riess, G. Ghibaudo, G. Pananakakis, J. Brini, and G. Ghidini, "Electric field and temperature dependence of the stress induced leakage current: Fowler-Nordheim or Schottky emission?," J. Non-Cryst. Solids, vol. 245, pp. 48, 1999.
    • (1999) J. Non-Cryst. Solids , vol.245 , pp. 48
    • Riess, P.1    Ghibaudo, G.2    Pananakakis, G.3    Brini, J.4    Ghidini, G.5
  • 7
    • 0001478341 scopus 로고    scopus 로고
    • Analysis of the stress-induced leakage current and related trap distribution
    • P. Riess, G. Ghibaudo, and P. Pananakakis, "Analysis of the stress-induced leakage current and related trap distribution," Appl. Phys. Lett., vol. 75, p. 3871, 1999.
    • (1999) Appl. Phys. Lett. , vol.75 , pp. 3871
    • Riess, P.1    Ghibaudo, G.2    Pananakakis, P.3
  • 8
    • 0033727592 scopus 로고    scopus 로고
    • A general bulk-limited transport analysis of a 10 nm thick oxide stress induced leakage current
    • B. De Salvo, G. Ghibaudo, G. Panankakis, B. Guillamot, and G. Reimbold, "A general bulk-limited transport analysis of a 10 nm thick oxide stress induced leakage current," Solid-State Electron., vol. 44, p. 895, 2000.
    • (2000) Solid-State Electron. , vol.44 , pp. 895
    • De Salvo, B.1    Ghibaudo, G.2    Panankakis, G.3    Guillamot, B.4    Reimbold, G.5
  • 9
    • 0031079521 scopus 로고    scopus 로고
    • Mechanism of stress-induced-leakage current in MOS capacitors
    • Feb.
    • R. Rosembaum and L. F. Register, "Mechanism of stress-induced-leakage current in MOS capacitors," IEEE Trans. Electron Devices, vol. 44, pp. 317-320, Feb. 1997.
    • (1997) IEEE Trans. Electron Devices , vol.44 , pp. 317-320
    • Rosembaum, R.1    Register, L.F.2
  • 10
    • 33744905856 scopus 로고
    • Mechanisms for stress induced leakage current in silicon dioxide films
    • Sept. 15
    • D. J. DiMaria and E. Cartier, "Mechanisms for stress induced leakage current in silicon dioxide films," J. Appl. Phys., vol. 78, pp. 3883-3886, Sept. 15, 1995.
    • (1995) J. Appl. Phys. , vol.78 , pp. 3883-3886
    • Dimaria, D.J.1    Cartier, E.2
  • 11
    • 0032141870 scopus 로고    scopus 로고
    • SILC-related effects in flash EEPROMs-Part I: A quantitative model for steady-state SILC
    • Aug.
    • J. D. Blauwe, J. Van Houdt, D. Wellekens, G. Groeseneken, and H. E. Maes, "SILC-related effects in Flash EEPROMs-Part I: A quantitative model for steady-state SILC," IEEE Trans. Electron Devices, vol. 45, pp. 1745-1749, Aug. 1998.
    • (1998) IEEE Trans. Electron Devices , vol.45 , pp. 1745-1749
    • Blauwe, J.D.1    Van Houdt, J.2    Wellekens, D.3    Groeseneken, G.4    Maes, H.E.5
  • 12
    • 0032678403 scopus 로고    scopus 로고
    • Tunneling bursts for negligible SILC degradation
    • July
    • B. Riccò and A. Pieracci, "Tunneling bursts for negligible SILC degradation," IEEE Trans. Electron Devices, vol. 46, pp. 1497-1500, July 1999.
    • (1999) IEEE Trans. Electron Devices , vol.46 , pp. 1497-1500
    • Riccò, B.1    Pieracci, A.2
  • 14
    • 0033740172 scopus 로고    scopus 로고
    • Modeling of SILC based on electron and hole tunneling-Part I: Transient effects
    • June
    • D. Ielmini, A. S. Spinelli, M. A. Rigamonti, and A. L. Lacaita, "Modeling of SILC based on electron and hole tunneling-Part I: Transient effects," IEEE Trans. Electron Devices, vol. 47, pp. 1258-1264, June 2000.
    • (2000) IEEE Trans. Electron Devices , vol.47 , pp. 1258-1264
    • Ielmini, D.1    Spinelli, A.S.2    Rigamonti, M.A.3    Lacaita, A.L.4
  • 15
    • 0035472026 scopus 로고    scopus 로고
    • Numerical confirmation of inelastic-trap-assisted tunneling (ITAT) as SILC mechanism
    • Oct.
    • T. K. Kang, M. J. Chen, C. H. Lee, Y. J. Chang, and S. K. Fan, "Numerical confirmation of inelastic-trap-assisted tunneling (ITAT) as SILC mechanism," IEEE Trans. Electron Devices, vol. 48, pp. 2317-2323, Oct. 2001.
    • (2001) IEEE Trans. Electron Devices , vol.48 , pp. 2317-2323
    • Kang, T.K.1    Chen, M.J.2    Lee, C.H.3    Chang, Y.J.4    Fan, S.K.5
  • 16
    • 0033080259 scopus 로고    scopus 로고
    • Experimental evidence of inelastic tunneling in stress induced leakage current
    • Feb.
    • S. Takagi, N. Yasuda, and A. Toriumi, "Experimental evidence of inelastic tunneling in stress induced leakage current," IEEE Trans. Electron Devices, vol. 46, pp. 335-347, Feb. 1999.
    • (1999) IEEE Trans. Electron Devices , vol.46 , pp. 335-347
    • Takagi, S.1    Yasuda, N.2    Toriumi, A.3
  • 17
    • 0035832964 scopus 로고    scopus 로고
    • Degradation kinetics of stressed oxides
    • F. Irrera, "Degradation kinetics of stressed oxides," Appl. Phys. Lett., vol. 79, pp. 182-184, 2001.
    • (2001) Appl. Phys. Lett. , vol.79 , pp. 182-184
    • Irrera, F.1
  • 18
    • 0036497364 scopus 로고    scopus 로고
    • Investigation and modeling of stressed thermal oxides
    • D. Caputo and F. Irrera, "Investigation and modeling of stressed thermal oxides," Microelectron. Reliab., vol. 42, pp. 327-333, 2002.
    • (2002) Microelectron. Reliab. , vol.42 , pp. 327-333
    • Caputo, D.1    Irrera, F.2
  • 19
    • 84897687705 scopus 로고
    • Toward a practical model of a-Si:H defects in intensity-time-temperature space
    • D. Caputo, J. Bullock, H. Gleskova, and S. Wagner, "Toward a practical model of a-Si : H defects in intensity-time-temperature space," in Proc. Mat. Res. Sci. Symp., vol. 336, 1994, pp. 165-169.
    • (1994) Proc. Mat. Res. Sci. Symp. , vol.336 , pp. 165-169
    • Caputo, D.1    Bullock, J.2    Gleskova, H.3    Wagner, S.4
  • 20
    • 4243798052 scopus 로고
    • Light-induced metastable defects in hydrogenated amorphous silicon: A systematic study
    • July
    • M. Stutzmann, W. B. Jackson, and C. C. Tsai, "Light-induced metastable defects in hydrogenated amorphous silicon: A systematic study," Phys. Rev. B., vol. 32, pp. 23-47, July 1985.
    • (1985) Phys. Rev. B. , vol.32 , pp. 23-47
    • Stutzmann, M.1    Jackson, W.B.2    Tsai, C.C.3
  • 21
    • 84988432351 scopus 로고    scopus 로고
    • 2/p-sub structures designed for applications in low-voltage nonvolatile memories
    • Nov.
    • 2/p-sub structures designed for applications in low-voltage nonvolatile memories," Microelectron. Reliab., vol. 41, pp. 1809-1813, Nov. 2001.
    • (2001) Microelectron. Reliab. , vol.41 , pp. 1809-1813
    • Irrera, F.1
  • 23
    • 21544458715 scopus 로고
    • Impact ionization, trap creation, degradation and breakdown in silicon dioxide films on silicon
    • D. J. Di Maria, "Impact ionization, trap creation, degradation and breakdown in silicon dioxide films on silicon," J. Appl. Phys., vol. 78, pp. 3367-3370, 1993.
    • (1993) J. Appl. Phys. , vol.78 , pp. 3367-3370
    • Di Maria, D.J.1
  • 24
    • 0032284230 scopus 로고    scopus 로고
    • Explanation of stress-induced damage in thin oxides
    • J. D. Bude, B. E. Weir, and P. J. Silverman, "Explanation of stress-induced damage in thin oxides," in IEDM Tech. Dig., 1998, pp. 179-182.
    • (1998) IEDM Tech. Dig. , pp. 179-182
    • Bude, J.D.1    Weir, B.E.2    Silverman, P.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.