Effects of nitrogen on the structure and properties of highly tetrahedral amorphous carbon films

Journal of Physics D: Applied Physics

Volumn 31, Issue 13, 1998, Pages 1522-1526

  Wei, Aixiang ^a   Chen, Dihu ^a,b   Ke, Ning ^b   Cheung, W Y ^b   Peng, Shaoqi ^a   Wong, S P ^b  

^a SUN YAT SEN UNIVERSITY   (China)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; CHEMICAL BONDS; ELECTRIC CONDUCTIVITY MEASUREMENT; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GRAPHITIZATION; MAGNETIC FIELD EFFECTS; NITRIFICATION; NITROGEN; PLASMA APPLICATIONS; SPUTTER DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

MAGNETIC FIELD FILTERED PLASMA STREAM DEPOSITION METHODS; ULTRAVIOLET VISIBLE OPTICAL ABSORPTION SPECTROSCOPY;

AMORPHOUS FILMS;

EID: 0032493222     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/13/005     Document Type: Article

References (17)

1. McKenzie D R 1991 Diamond Relat. Mater. 1 51
2. Lifshitz Y 1996 Diamond Relat. Mater. 5 388
3. McKenzie D R 1996 Rep. Prog. Phys. 59 1611
4. Wada N, Gaczi P J and Solin S A 1980 J. Non-Cryst. Solid 35-36 543
5. Jones D I and Stewart A D 1982 Phil. Mag. B 46 423
6. Han H X and Feldman B J 1988 Solid State Commun. 65 921
7. Helmbold A, Hammer P, Thiele J U, Rohwer K and Meissner D 1995 Phil. Mag. B 72 335
8. Schwan J, Dworschak W, Jung K and Ehrhardt H 1994 Diamond Relat. Mater. 3 1034
9. Veerasamy V S 1993 J. Phys.: Condens. Matter 5 L169
10. Veerasamy V S, Yuan J, Amaratunga G A J, Milne W I, Gilkes K W R, Weiler M and Brown L M 1993 Phys. Rev. B 48 17 954
11. Aixiang Wei, Dihu Chen, Shaogi Peng, Ning Ke and Wong S P 1997 Diamond Relat. Mater. 6 983
12. Zhaocu Wu, Yuehui Yu and Xianghuai Liu 1996 Appl. Phys. Lett. 68 1291
13. Mizokawa Y, Miyasoto T, Nakamura S, Geib K M and Wilmsea C W 1988 J. Vac. Sci. Technol. A 5 2809
14. Marton D, Boyd K J, Al-Bayai A H, Toaorov S S and Rabalias J W 1994 Phys. Rev. Lett. 73 118
15. Kaufman J H, Metin S and Saperstein D D 1989 Phys. Rev. B 39 13 053
16. Zhao X A, Ong C W, Tsang Y C, Wong Y W, Cha P W and Choy C L 1995 Appl. Phys. Lett. 66 2652
17. Dong Li and Yip-Wah Chung 1994 J. Vac. Sci. Technol. A 12 1470