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Volumn 11, Issue 9, 2002, Pages 1676-1682
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XPS studies on silicon carbonitride films prepared by sequential implantation of nitrogen and carbon into silicon
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Author keywords
Ion implantation; Silicon carbonitride; Thin film; XPS
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Indexed keywords
CARBON;
CHEMICAL BONDS;
ION IMPLANTATION;
NITROGEN;
SILICON COMPOUNDS;
X RAY PHOTOELECTRON SPECTROSCOPY;
SILICON CARBONITRIDE FILMS;
DIAMOND LIKE CARBON FILMS;
ION IMPLANTATION;
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EID: 0036720633
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(02)00143-7 Document Type: Article |
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Times cited : (47)
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References (23)
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