Bonding structure and properties of ion enhanced reactive magnetron sputtered silicon carbonitride films

Journal of Physics Condensed Matter

Volumn 12, Issue 37, 2000, Pages

  He, Xiao Ming ^a   Taylor, T N ^a   Lillard, R S ^a   Walter, K C ^a   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ARGON; CHEMICAL BONDS; DENSITY (SPECIFIC GRAVITY); HARDNESS; MAGNETRON SPUTTERING; NITROGEN; OXIDATION RESISTANCE; OXYGEN; STRESS ANALYSIS; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

SILICON CARBONITRIDE;

SILICON NITRIDE;

EID: 0034269589     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/12/37/101     Document Type: Article

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