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Volumn 149, Issue 7, 2002, Pages

Modifications of low dielectric constant fluorinated amorphous carbon films by multiple plasma treatments

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARBON; CHEMICAL BONDS; DIFFUSION; HYDROPHOBICITY; PASSIVATION; PERMITTIVITY; PLASMAS; PYROLYSIS; THERMODYNAMIC STABILITY;

EID: 0036642094     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1481069     Document Type: Article
Times cited : (15)

References (19)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.