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Volumn 24, Issue 1-2, 2002, Pages 241-245
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Charge transfer: A key issue in silicon thermal oxidation growth
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Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
CHARGE TRANSFER;
CHEMICAL BONDS;
MONTE CARLO METHODS;
REACTION KINETICS;
THERMOOXIDATION;
ELECTRONEGATIVITY;
SILICA;
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EID: 0036577319
PISSN: 09270256
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0256(02)00201-X Document Type: Conference Paper |
Times cited : (4)
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References (22)
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