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Surface Science

Volumn 389, Issue 1-3, 1997, Pages

Oxidation of Si (100)2 × 1: Thermodynamics of oxygen insertion and migration

(2) Stefanov, Boris B a Raghavachari, Krishnan a

a LUCENT TECHNOLOGIES (United States)

Author keywords

Density functional calculations; Oxidation; Silicon; Surface chemical reaction

Indexed keywords

CHEMICAL BONDS; COMPUTATIONAL METHODS; MATHEMATICAL MODELS; OXIDATION; OXYGEN; QUANTUM THEORY; SURFACE PHENOMENA; SURFACE STRUCTURE; THERMODYNAMIC STABILITY;

DIMER BONDS; OXYGEN INSERTION; OXYGEN MIGRATION; QUANTUM CHEMICAL CALCULATIONS;

SEMICONDUCTING SILICON;

EID: 0031556610 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(97)00613-4 Document Type: Article

Times cited : (49)

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