Silicon epoxide: Unexpected intermediate during silicon oxide formation

Physical Review Letters

Volumn 81, Issue 18, 1998, Pages 3908-3911

  Stefanov, Boris B ^a   Gurevich, Alejandra B ^a   Weldon, Marcus K ^a   Raghavachari, Krishnan ^a   Chabal, Yves J ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000060263     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.81.3908     Document Type: Article

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