Bistable microrelay based on two-segment multimorph cantilever actuators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 154-159

  Sun, Xi Qing ^a   Farmer, K R ^a   Carr, W N ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC BREAKDOWN OF SOLIDS; ELECTRIC RESISTANCE; ELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROMACHINING;

BISTABLE MICRORELAYS; MECHANICAL LATCHING; MULTIMORPH CANTILEVER ACTUATORS; THERMAL ACTUATION; THERMAL POWER PULSES;

ELECTRIC RELAYS;

EID: 0031677501     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)