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Volumn 110, Issue 1281, 2002, Pages 408-415

Fabrication technology of high-dielectric SrTiO3 thin film capacitors for microwave circuits

(4) Morito, Kentaro a Wakabayashi, Hirotaka a Suzuki, Toshimasa a Fujimoto, Masayuki a

Author keywords

By pass (RF shunt) capacitor; Hillock; Microwave monolithic integrated circuits (MMIC); Platinum; Reactive ion etching (RIE); SrTiO3; Thin film

Indexed keywords

CAPACITORS; DIELECTRIC MATERIALS; ELECTRODES; HEAT TREATMENT; PEROVSKITE; PLATINUM; REACTIVE ION ETCHING; SILICON; STRONTIUM COMPOUNDS; SUBSTRATES; THIN FILMS;

BY-PASS CAPACITORS;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 0036565484 PISSN: 09145400 EISSN: None Source Type: Journal
DOI: 10.2109/jcersj.110.408 Document Type: Article

Times cited : (5)

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