Thermal stability of Pt bottom electrodes for ferroelectric capacitors

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 4 B, 1998, Pages

  Matsui, Yuichi ^a   Hiratani, Masahiko ^a   Kumagai, Yukihiro ^a   Miura, Hideo ^a   Fujisaki, Yoshihisa ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; FERROELECTRIC DEVICES; HEAT TREATMENT; PLATINUM; RESIDUAL STRESSES; TENSILE STRENGTH; THERMAL EFFECTS; THERMAL EXPANSION; THERMODYNAMIC STABILITY; TITANIUM NITRIDE;

FERROELECTRIC CAPACITORS; HILLOCK FORMATION;

METALLIC FILMS;

EID: 0032045495     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l465     Document Type: Article

References (9)