SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 1, 1998, Pages 210-214

Upper-bound frequency for measuring mm-wave-band dielectric characteristics of thin films on semiconductor substrates

(3) Ikuta, Kenji a Umeda, Yohtaro a Ishii, Yasunobu a

a NTT CORPORATION (Japan)

Author keywords

Dielectric constant; MIM capacitors; mm wave; MMIC; Qf product; STO; Strontium titanate; Thin film dielectrics

Indexed keywords

CAPACITANCE; CAPACITORS; ELECTRON CYCLOTRON RESONANCE; MIM DEVICES; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; PERMITTIVITY; SEMICONDUCTOR MATERIALS; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; SUBSTRATES;

PARALLEL STRAY ELEMENTS; STRONTIUM TITANATE; UPPER BOUND FREQUENCY;

DIELECTRIC FILMS;

EID: 0031647586 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.37.210 Document Type: Article

Times cited : (8)

References (10)

1
- 0027802738
- San Jose
- M. Nishitsuji, A. Tamura, T. Kunihisa, K. Yahata, M. Shibuya, M. Kitagawa and T. Hirao: 15th GaAs IC Symp. Tech. Dig., San Jose (1993) p. 329.
- (1993) 15th GaAs IC Symp. Tech. Dig. , pp. 329
- Nishitsuji, M.¹ Tamura, A.² Kunihisa, T.³ Yahata, K.⁴ Shibuya, M.⁵ Kitagawa, M.⁶ Hirao, T.⁷

2
- 0030385301
- T. B. Nishimura, N. Iwata, K. Takemura, M. Kuzuhara and Y. Miyasaka: Jpn. J. Appl. Phys. 35 (1996) L1683.
- (1996) Jpn. J. Appl. Phys. , vol.35
- Nishimura, T.B.¹ Iwata, N.² Takemura, K.³ Kuzuhara, M.⁴ Miyasaka, Y.⁵

3
- 4243825443
- E. Fujii, Y. Umeno, S. Hayashi, T. Nasu, Y. Shimada, A. Matsuda, M. Kibe, A. Azuma, T. Otsuki, G. Kano, M. Scott, L. D. McMillan and C. A. Paz. de Araujo: Tech. Dig. IEDM 92 (1992) p. 267.
- (1992) Tech. Dig. IEDM 92 , pp. 267
- Fujii, E.¹ Umeno, Y.² Hayashi, S.³ Nasu, T.⁴ Shimada, Y.⁵ Matsuda, A.⁶ Kibe, M.⁷ Azuma, A.⁸ Otsuki, T.⁹ Kano, G.¹⁰ Scott, M.¹¹ McMillan, L.D.¹² Paz De Araujo, C.A.¹³

4
- 0030382689
- T. S. Chen, D. Hadad, V. Balu, B. Jiang, S. H. Kauh, P. C. McIntyre, S. R. Summerfelt, J. M. Anthony and J. C. Lee: Tech. Dig. IEDM 96 (1996) p. 679.
- (1996) Tech. Dig. IEDM 96 , pp. 679
- Chen, T.S.¹ Hadad, D.² Balu, V.³ Jiang, B.⁴ Kauh, S.H.⁵ McIntyre, P.C.⁶ Summerfelt, S.R.⁷ Anthony, J.M.⁸ Lee, J.C.⁹

5
- 0030408838
- for example, P. M. Smith: IEEE Trans. Microwave Theory & Technol. 44 (1996) 2328.
- (1996) IEEE Trans. Microwave Theory & Technol. , vol.44 , pp. 2328
- Smith, P.M.¹

6
- 0000196207
- K. Wakino, H. Tamura and Y. Sudo: Microwave J. 6 (1987) 133.
- (1987) Microwave J. , vol.6 , pp. 133
- Wakino, K.¹ Tamura, H.² Sudo, Y.³

7
- 84956270871
- San Francisco, TP 11.3
- S. Nagata, T. Ueda, A. Noma, H. Koizumi, K. Kanazawa, H. Ishida, T. Ueda, T. Tanaka, D. Ueda, M. Kazumura, G. Kano and C. P. D. Araujo: 1993 IEEE Int. Solid-State Circuits Conf., San Francisco, TP 11.3, p. 172.
- 1993 IEEE Int. Solid-State Circuits Conf. , pp. 172
- Nagata, S.¹ Ueda, T.² Noma, A.³ Koizumi, H.⁴ Kanazawa, K.⁵ Ishida, H.⁶ Ueda, T.⁷ Tanaka, T.⁸ Ueda, D.⁹ Kazumura, M.¹⁰ Kano, G.¹¹ Araujo, C.P.D.¹²

8
- 0029369437
- K. Ikuta, Y. Umeda and Y. Ishii: Jpn. J. Appl. Phys. 34 (1995) L1211.
- (1995) Jpn. J. Appl. Phys. , vol.34
- Ikuta, K.¹ Umeda, Y.² Ishii, Y.³

9
- 0030080313
- K. Ikuta, Y. Umeda and Y. Ishii: Jpn. J. Appl. Phys. 35 (1996) 1513.
- (1996) Jpn. J. Appl. Phys. , vol.35 , pp. 1513
- Ikuta, K.¹ Umeda, Y.² Ishii, Y.³

10
- 3743122942
- T. Takahashi, Y. Iijima, M. Kobayashi and T. Miura: Jpn. J. Appl. Phys. 33 (1994) 5255.
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 5255
- Takahashi, T.¹ Iijima, Y.² Kobayashi, M.³ Miura, T.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.