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Surface Science Reports

Volumn 45, Issue 3, 2002, Pages 79-116

Growth of short-period epitaxial superlattices for X-ray multilayer mirrors

(2) Kingetsu, Toshiki a Yamamoto, Masahiko b

a RIGAKU CORPORATION (Japan)

b OSAKA UNIVERSITY (Japan)

Author keywords

Atomic layer epitaxy; Interfacial roughness; Molecular beam epitaxy; Multilayer; Reflectance; Short period; Soft X ray mirror; Superlattice

Indexed keywords

CRYSTAL STRUCTURE; MIRRORS; MOLECULAR BEAM EPITAXY; MULTILAYERS; REFLECTION; SEMICONDUCTOR SUPERLATTICES; X RAYS;

X RAY MULTILAYER MIRRORS;

SURFACE ROUGHNESS;

EID: 0036500061 PISSN: 01675729 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-5729(01)00018-8 Document Type: Review

Times cited : (15)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.