High precision large area PLD of X-ray optical multilayers

Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 451-456

  Dietsch, R ^a   Holz, Th ^a   Mai, H ^a   Meyer, C F ^a   Scholz, R ^b   Wehner, B ^c  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

^b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

^c DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

High resolution electron microscopy; Large area PLD; Laser ablation; Multilayer; Ni C multilayer; PLD; X ray optics; X ray reflectometry

Indexed keywords

CARBON; DEPOSITION; ELECTRON MICROSCOPY; LASER ABLATION; LASER PRODUCED PLASMAS; MOLECULAR BEAM EPITAXY; NEODYMIUM LASERS; NICKEL; PULSED LASER APPLICATIONS; SURFACE ROUGHNESS; SYNTHESIS (CHEMICAL);

GRAZING INCIDENCE X RAY REFLECTOMETRY; PULSED LASER DEPOSITION (PLD); X RAY OPTICS;

OPTICAL MULTILAYERS;

EID: 0342765958     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00671-5     Document Type: Article

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