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Volumn 36, Issue 10, 1997, Pages 2152-2156

Reflection-wavelength control method for layer-by-layer controlled x-ray multilayer mirrors

Author keywords

Layer by layer; Multiperiodic mirror; Phase compensation

Indexed keywords


EID: 0008665123     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.002152     Document Type: Article
Times cited : (8)

References (12)
  • 1
    • 84975635029 scopus 로고
    • Molybdenum-silicon multilayer mirrors for the extreme ultraviolet
    • T. W. Barbee, S. Mrowka, and M. C. Hettrick, “Molybdenum-silicon multilayer mirrors for the extreme ultraviolet,” Appl. Opt. 24, 883-886 (1985).
    • (1985) Appl. Opt. , vol.24 , pp. 883-886
    • Barbee, T.W.1    Mrowka, S.2    Hettrick, M.C.3
  • 2
    • 84975534742 scopus 로고    scopus 로고
    • Normal-incidence x-ray mirror for 7 nm
    • D. G. Stearns, R. S. Rosen, and S. P. Vernon, “Normal-incidence x-ray mirror for 7 nm,” Opt. Lett. 16, 1283-1285 (1991).
    • Opt. Lett. , vol.16 , pp. 1283-1285
    • Stearns, D.G.1    Rosen, R.S.2    Vernon, S.P.3
  • 6
    • 0022062138 scopus 로고    scopus 로고
    • Molecular layer epitaxy
    • J. Nishizawa, “Molecular layer epitaxy,” J. Electrochem. Soc. 132, 1197-1200 (1985).
    • J. Electrochem. Soc. , vol.132 , pp. 1197-1200
    • Nishizawa, J.1
  • 7
    • 0038331479 scopus 로고
    • Atomic-layer growth of GaAs by modulated-continuous-wave laser metalorganic vapor-phase epitaxy
    • Y. Aoyagi, “Atomic-layer growth of GaAs by modulated-continuous-wave laser metalorganic vapor-phase epitaxy,” J. Vac. Sci. Technol. B5, 1460-1464 (1987).
    • (1987) J. Vac. Sci. Technol. , vol.B5 , pp. 1460-1464
    • Aoyagi, Y.1
  • 9
    • 0004932883 scopus 로고    scopus 로고
    • X-ray interactions: Photo absorption, scattering, transmission, and reflection at E = 50-30, 000 eV, Z = 1-92
    • B. L. Henke, E. M. Gullikson, and J. C. Davis, “X-ray interactions: photo absorption, scattering, transmission, and reflection at E = 50-30, 000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181-342 (1993).
    • At. Data Nucl. Data Tables , vol.54 , pp. 181-342
    • Henke, B.L.1    Gullikson, E.M.2    Davis, J.C.3
  • 12
    • 84975672166 scopus 로고
    • Layer-by-layer design method for soft-x-ray multilayers
    • M. Yamamoto and T. Namioka, “Layer-by-layer design method for soft-x-ray multilayers,” Appl. Opt. 31, 1622-1630 (1992).
    • (1992) Appl. Opt. , vol.31 , pp. 1622-1630
    • Yamamoto, M.1    Namioka, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.