Development of soft X-ray multilayer mirrors for a wavelength of 3 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3767, Issue , 1999, Pages 238-241

  Sakano, Kiwamu ^a   Yamamoto, Masaki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; ELECTROMAGNETIC WAVE REFLECTION; ION BEAMS; ION BOMBARDMENT; OPTICAL MULTILAYERS; SCANDIUM; SPUTTER DEPOSITION; X RAY ANALYSIS;

SOFT X RAY MULTILAYER MIRRORS;

MIRRORS;

EID: 0033364747     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)