A surface-bulk-micromachined electromagnetic gyroscope operating at atmospheric pressure

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 12 B, 2000, Pages 7130-7133

  Kim, Seong Hyok ^a   Kim, Yong Kweon ^a   Song, Jin Woo ^a   Lee, Jang Gyu ^a  

^a Seoul National University   (South Korea)

Author keywords

(110) silicon anisotropic etching; Combined micromachining; Electromagnetic gyroscope; Operating at atmospheric pressure; UV LIGA process

Indexed keywords

ANISOTROPY; ATMOSPHERIC PRESSURE; ELECTROMAGNETISM; ELECTROSTATIC DEVICES; ETCHING; MICROMACHINING; SILICON;

ELECTROMAGNETIC GYROSCOPES;

GYROSCOPES;

EID: 0034430264     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.7130     Document Type: Article

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