Novel fabrication of comb actuator using reactive ion etching of polysilicon and (110) Si anisotropic bulk etching in KOH

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12 B, 1998, Pages 7086-7092

  Lim, Hyung Taek ^a   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

Author keywords

(110) Si; Comb actuator; KOH; Polysilicon and RIE; Wet etching

Indexed keywords

EID: 0006409729     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.7086     Document Type: Article

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