Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1197-1200

  Mizuno, Jun ^a   Nottmeyer, Kay ^a   Kobayashi, Takashi ^a   Minami, Kazuyuki ^a   Esashi, Masayoshi ^a  

^a ZEXEL Corporation   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; MICROMACHINING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SENSITIVITY ANALYSIS;

SILICON BULK MICROMACHINED ACCELEROMETER; SINGLE POINT SENSING;

ACCELEROMETERS;

EID: 0030648873     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)