Fabrication and applications of lift-off vertical cavity surface emitting laser (VCSEL) disks

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4649, Issue , 2002, Pages 203-210

  Lott, J A ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Epitaxial lift off; Flip chip bonding; Microelectromechanical system (MEMS); Vertical cavity surface emitting lasers (VCSELs)

Indexed keywords

EPITAXIAL GROWTH; ETCHING; MIRRORS; OXIDES; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE MANUFACTURE;

DISTRIBUTED BRAGG REFLECTORS; VERTICAL CAVITY SURFACE EMITTING LASER DISKS; VERTICAL CAVITY SURFACE EMITTING LASERS; WET CHEMICAL ETCHING;

SEMICONDUCTOR LASERS;

EID: 0036407628     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.469235     Document Type: Conference Paper

References (31)

1. Cronos Integrated Microsystems (a JDS Uniphase Co.), 3026 Cornwallis Road, Research Triangle, Park, NC 27709.
2. Sandia National Laboratories (U.S. Dept of Energy), Albuquerque, NM, 87185.
3. J.A. Lott, "Fabrication and Assembly Studies of III-V Semiconductor Microlaser Disks and Actuators: Toward Optical Nanoelectromechanical Systems", Presented at Advanced Research Workshop, Future Trends in Microelectronics: The Nano-Mellenium, Ile de Bendor, France, 25-29 June 2001.
4. J.A. Lott, "Design, Fabrication, and Assembly Studies of AlGaAs/GaAs Optical MEMS Structures", Presented at SPIE 4592-39 Microelectronics and MEMS, Adelaide, Australia, 17-19 December 2001.
5. C. Wilmsen, H. Temkin, and L.A. Coldren, Editors, Vertical-Cavity Surface-Emitting Lasers, (Cambridge University Press ISBN 0-521-59022-1), 1999.
6. K. Hjort, "Sacrificial Etching of III-V Compounds for Micromechanical Devices", Journal of Micromechanics and Microengineering (Institute of Physics) 6(4), pp. 370-375, 1996.
7. E. Yablonovitch, T. Gmitter, J.P. Harbison, and R. Bhat, "Extreme Selectivity in the Lift-Off of Epitaxial GaAs Films," Applied Physics Letters 51(26), pp. 2222-2224, 1987.
8. K.D. Choquette, K.M. Geib, B. Roberds, H.Q. Hou, R.D. Twesten, and B.E. Hammons, "Short Wavelength Bottom-Emitting Vertical Cavity Lasers Fabricated using Wafer Bonding," Electronics Letters, 34(14), pp. 1404-1405 9 July 1998.
9. Y. Xiong, Y. Zhou, Y.-H. Lo, C. Ji, S.A. Bashar, A. A. Allerman, T. Hargett, R. Sieg, and K.D. Choquette, "Oxide-Defined GaAs Vertical-Cavity Surface-Emitting Lasers on Si Substrates," IEEE Photonics Technology Letters 12(2), pp. 110-112, February 2000.
10. C.-K. Lin, S.-W. Ryu, W.-J. Choi, and P.D. Dapkus, "Wafer-Bonded Bottom-Emitting 850-nm VCSELs on GaP Substrates," IEEE Photonics Technology Letters 11(8), pp. 937-939, August 1999.
11. C.-K. Lin, S.-W. Ryu, and P.D. Dapkus, "High-Performance Wafer-Bonded Bottom-Emitting 850-nm VCSELs on Undoped GaP and Sapphire Substrates," IEEE Photonics Technology Letters 11(12), pp. 1542-1544, December 1999.
12. K.D. Choquette, K.M. Geib, C.I.H. Ashby, R.D. Twesten, O. Blum, H.Q. Hou, D.M. Follstaedt, B.E. Hammons, D. Mathes, and R. Hull, "Advances in Selective Wet Oxidation of AlGaAs Alloys," IEEE Selected Topics in Quantum Electronics, 3(3), pp. 916-926, June 1997.
13. B. Koley, M. Dagenais, R. Jin, G. Simonis, J. Pham, G. McLane, F. Johnson, and R. Whaley Jr., "Dependence of Lateral Oxidation Rate on Thickness of AlAs Layer of Interest as a Current Aperture in Vertical-Cavity Surface-Emitting Lasers Structures," Journal of Applied Physics, 84(1), pp. 600-605, 1 July 1998.
14. D.A. Louderback, O. Sölund, E.R. Hegblom, J. Ko, and L.A. Coldren, "Flip-Chip Bonded Arrays of Monolithically Integrated, Microlensed Vertical-Cavity Lasers and Resonant Photodetectors," IEEE Photonics Technology Letters 11(3), pp. 304-306, March 1999.
15. C. Jung, R. King, R. Jäger, M. Grabherr, F. Eberhard, R. Rosch, U. Martin, D. Wiedenmann, H. Unold, R. Michalzik, and K.J. Ebling, "64 Channel Flip-Chip Mounted Selectively Oxidized GaAs VCSEL Array for Parallel Optical Interconnects," SPIE 3627 VCSELs III, pp. 143-151, January 1999.
16. C.J. Chang-Hasnain, "Tunable VCSELs," IEEE Selected Topics in Quantum Electronics, 6(6), pp. 978-987, November/December 2000.
17. x Deformable Mirrors," IEEE Photonics Technology Letters 10(3), pp. 394-396, March 1998.
18. J.A. Lott, M.J. Noble, E.M. Ochoa, L.A. Starman, and W.D. Cowan, "Tunable Red Vertical Cavity Surface Emitting Lasers Using Flexible Micro-Electro-Mechanical Top Mirrors", Proceedings IEEE LEOS Optical MEMS 2000, Kauai, Hawaii, pp. 81-82, 20-24 August 2000.
19. O. Blum Spahn, C. Sullivan, J. Burkhart, C. Tigges, and E. Garcia, "GaAs-Based Microelectromechanical Waveguide Switch", Proceedings IEEE LEOS Optical MEMS 2000, Kauai, Hawaii, pp. 41-42, 20-24 August 2000.
20. F. Sugihwo, M.C. Larson, and J.S. Harris Jr., "Micromachined Widely Tunable Vertical Cavity Laser Diodes," Journal of Microelectromechanical Systems, 7(1), pp. 48-55, March 1998.
21. T. Amano, F. Koyama, N. Nishiyama, and K. Iga, "Temperature Insensitive Micromachined AlGaAs-GaAs Vertical Cavity Filter," IEEE Photonics Technology Letters 12(5), pp. 510-512, May 2000.
22. T. Amano, F. Koyama, N. Nishiyama, and K. Iga, "Multiple Wavelength Micromachined GaAlAs/GaAs Vertical Cavity Filter Array," Proceedings of the IEEE LEOS International Conference on Optical MEMS, paper MB3, pp.21-22, Kauai, Hawaii, 21-24 August 2000.
23. R.L. Naone and L. A. Coldren, "Tapered Air Apertures for Thermally Robust VCL Structures," IEEE Photonics Technology Letters 11(11), pp. 1339-1341, November 1999.
24. E. Hall, S. Nakagawa, G. Almuneau, J.K. Kim, and L.A. Coldren, Selectively Etched Undercut Apertures in AlAsSb-Based VCSELs," IEEE Photonics Technology Letters 13(2), pp. 97-99, February 2001.
25. J.K. Tu, J.J. Talghader, M.A. Hadley, and J.S. Smith, "Fluidic Self-Assembly of InGaAs Vertical Cavity Surface Emitting Lasers onto Silicon", Electronics Letters, 31(17), pp. 1448-1449, 17 August 1995.
26. J.J. Talghader, "Integration of LEDs and VCSELs Using Fluidic Self-Assembly," Proceedings SPIE 3286 Vertical-Cavity Surface-Emitting Lasers II., pp. 86-95, San Jose, California, January 1998.
27. U. Srinivasan, D. Liepmann, and R.T. Howe, "Microstructure to Substrate Self-Assembly Using Capillary Forces," IEEE Journal of Microelectromechanical Systems 10(1), pp. 17-24, March 2001.
28. W.L. Bernhard, "Optical and Etching Studies of Native Aluminum Oxide Layers for use in Microcavity Photonic Devices," Masters Thesis, Air Force Institute of Technology, AFIT/GE-01M-01, March 2001.
29. M.J. Noble, J.P. Loehr, and J.A. Lott, "Analysis of Microcavity VCSEL Lasing Modes Using a Full Vector Weighted Index Method," IEEE Journal of Quantum Electronics, 34(10), pp. 1890-1903, October 1998.
30. E.M. Ochoa, L.A. Starman, W.D. Cowan, T.R. Nelson, Jr., O. Blum Spahn, and J.A. Lott, "Polysilicon Prototypes for Flip-Bonded Hybrid MEM-Tunable Filters and VCSELs", to be presented at the Fifth International Conference on Modeling and Simulation of Microsystems, San Juan, Puerto Rico (22-25 April 2002).
31. J.A. Lott, "Assembly of Matrix-Addressed Two-Dimensional Arrays of Vertical Cavity Surface Emitting Lasers by Lift-Off", Presented at the Workshop on Frontiers in Electronics (WOFE-02), Christensted, St. Croix, U.S. Virgin Islands, 5-11 January 2002.