Polysilicon prototypes for flip-bonded hybrid MEM-tunable filters and VCSELs

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 266-269

  Ochoa, E M ^a   Starman Jr , L A ^a   Cowan, W D ^b   Nelson Jr , T R ^b   Spahn, O Blum ^c   Lott, J A ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Hybrid integration; MEMS; Tunable filter; Tunable VCSEL; WDM

Indexed keywords

AIR GAP; HYBRID INTEGRATION; TUNABLE FILTERS; VCSEL;

ACTUATORS; NATURAL FREQUENCIES; OPTOELECTRONIC DEVICES; POLYSILICON; SEMICONDUCTOR LASERS; THICKNESS MEASUREMENT; WAVELENGTH DIVISION MULTIPLEXING;

MICROELECTROMECHANICAL DEVICES;

EID: 6344294408     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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