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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 1, 2002, Pages 76-83

Oxidation of deuterium-, acetylene-, and ethylene-terminated Si(100) by atomic oxygen

(2) Litorja, Maritoni a Buntin, Steven A a

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; ADSORPTION; AUGER ELECTRON SPECTROSCOPY; DEFECTS; DEUTERIUM; ETHYLENE; GROUND STATE; OXIDATION; OXYGEN; PHOTOLYSIS; SILICON; SURFACE PROPERTIES;

ADLAYER SYSTEMS; ATOMIC OXYGEN; LASER PHOTOLYSIS; OXIDATION RATES;

ATOMIC PHYSICS;

EID: 0036169159 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1421598 Document Type: Article

Times cited : (3)

References (69)

1
- 0003691078
- edited by D. A. Glocker and S. I. Shah (Institute of Physics, Bristol, U.K.)
- (1995) Handbook of Thin Film Process Technology

2
- 0345423054
- and references therein
- (1995) Chem. Rev. , vol.95 , pp. 1589
- Waltenburg, H.N.¹ Yates Jr., J.T.²

3
- 0008330122
- (2001) Appl. Phys. Lett. , vol.78 , pp. 886
- Hersam, M.C.¹ Guisinger, N.P.² Lyding, J.W.³ Thompson, D.S.⁴ Moore, J.S.⁵

4
- 0033316528
- and references therein
- (1999) Surf. Sci. Rep. , vol.35 , pp. 1
- Oura, K.¹ Lifshits, V.G.² Saranin, A.A.³ Zotov, A.V.⁴ Katayama, M.⁵

5
- 0000462712
- (1989) Surf. Sci. , vol.207 , pp. 364
- Gates, S.M.¹ Kunz, R.R.² Greenlief, C.M.³

6
- 0000083104
- (1994) J. Chem. Phys. , vol.101 , pp. 3301
- Koleske, D.D.¹ Gates, S.M.² Jackson, B.³

7
- 0348212564
- (1995) Phys. Rev. Lett. , vol.74 , pp. 2074
- Widdra, W.¹ Yi, S.I.² Maboudian, R.³ Briggs, G.A.D.⁴ Weinberg, W.H.⁵

8
- 0031273619
- (1997) J. Phys. Chem. B , vol.101 , pp. 9537
- Chiang, C.-M.¹ Gates, S.M.² Lee, S.S.³ Kong, M.⁴ Bent, S.F.⁵

9
- 0000117893
- (1999) Chem. Phys. Lett. , vol.311 , pp. 202
- Dinger, A.¹ Lutterloh, C.² Küppers, J.³

10
- 0001514593
- (2000) J. Chem. Phys. , vol.112 , pp. 356
- Shimokawa, S.¹ Namiki, A.² Ando, T.³ Sato, Y.⁴ Lee, J.⁵

11
- 0001654505
- (1992) J. Am. Chem. Soc. , vol.114 , pp. 1249
- Cheng, C.C.¹ Lucas, S.R.² Gutleben, H.³ Choyke, W.J.⁴ Yates Jr., J.T.⁵

12
- 0026883101
- (1992) Surf. Sci. Lett. , vol.273
- Cheng, C.C.¹ Lucas, S.R.² Gutleben, H.³ Choyke, W.J.⁴ Yates Jr., J.T.⁵

13
- 36449009153
- (1993) J. Chem. Phys. , vol.99 , pp. 8218
- Koleske, D.D.¹ Gates, S.M.²

14
- 0008288301
- (1993) Thin Solid Films , vol.225 , pp. 150
- Yates Jr., J.T.¹ Cheng, C.C.² Gao, Q.³ Colaianni, M.L.⁴ Choyke, W.J.⁵

15
- 0028517771
- (1994) Appl. Surf. Sci. , vol.81 , pp. 223
- Saito, Y.¹

16
- 0032141515
- (1998) Surf. Sci. , vol.411 , pp. 163
- Sampson, G.M.¹ White, J.M.² Ekerdt, J.G.³

17
- 0000126228
- (1998) J. Chem. Phys. , vol.108 , pp. 7384
- McEllistrem, M.¹ Buehler, E.J.² Icthkawitz, B.S.³ Boland, J.J.⁴

18
- 84940376259
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 2451
- Thomas, R.E.¹ Rudder, R.A.² Markunas, R.J.³

19
- 21344475990
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 219
- Smentkowski, V.S.¹ Yates Jr., J.T.²

20
- 18244431957
- (2000) J. Chem. Phys. , vol.112 , pp. 8631
- Walker, A.V.¹ Klötzer, B.² King, D.A.³

21
- 0026863467
- (1992) Surf. Sci. , vol.268 , pp. 238
- Engstrom, J.R.¹ Bosner, D.J.² Engel, T.³

22
- 0008366938
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 1937
- Engstrom, J.R.¹ Nelson, M.M.² Engel, T.³

23
- 0026242042
- (1991) Surf. Sci. , vol.256 , pp. 317
- Engstrom, J.R.¹ Bonser, D.J.² Nelson, M.M.³ Engel, T.⁴

24
- 0027884236
- (1993) Surf. Sci. Rep. , vol.18 , pp. 91
- Engel, T.¹

25
- 0000365698
- (1995) J. Appl. Phys. , vol.77 , pp. 5125
- Ikeda, H.¹ Hotta, K.² Yamada, T.³ Zaima, S.⁴ Iwano, H.⁵ Yasuda, Y.⁶

26
- 0030235747
- (1996) Appl. Surf. Sci. , vol.104-105 , pp. 354
- Ikeda, H.¹ Hotta, K.² Furuta, S.³ Zaima, S.⁴ Yasuda, Y.⁵

27
- 0031548386
- (1997) Appl. Surf. Sci. , vol.117-118 , pp. 109
- Ikeda, H.¹ Nakagawa, Y.² Toshima, M.³ Furuta, S.⁴ Zaima, S.⁵ Yasuda, Y.⁶

28
- 0031548140
- (1997) Appl. Surf. Sci. , vol.117-118 , pp. 114
- Ohmori, K.¹ Ikeda, H.² Iwano, H.³ Zaima, S.⁴ Yasuda, Y.⁵

29
- 0026856408
- (1992) Surf. Sci. , vol.268 , pp. 205
- Clemen, L.¹ Wallace, R.M.² Taylor, P.A.³ Dresser, M.J.⁴ Choyke, W.J.⁵ Weinberg, W.H.⁶ Yates Jr., J.T.⁷

30
- 0000670274
- (1992) J. Am. Chem. Soc. , vol.114 , pp. 6754
- Taylor, P.A.¹ Wallace, R.M.² Cheng, C.C.³ Weinberg, W.H.⁴ Dresser, M.J.⁵ Choyke, W.J.⁶ Yates Jr., J.T.⁷

31
- 4243444510
- (1996) J. Chem. Phys. , vol.105-108
- Buntin, S.A.¹

32
- 0028433802
- (1994) Surf. Sci. , vol.311 , pp. 101
- Westermann, J.¹ Nienhaus, H.² Mönch, W.³

33
- 0027606662
- (1993) Surf. Sci. , vol.290 , pp. 213
- Johnson, K.E.¹ Wu, P.K.² Sander, M.³ Engel, T.⁴

34
- 26144456383
- (1994) Surf. Sci. , vol.285 , pp. 301
- Bu, H.¹ Rabalais, J.W.²

35
- 0008292023
- note

36
- 0003158036
- edited by G. Scoles (Oxford University Press, Oxford, U.K.)
- (1988) Atomic and Molecular Beam Methods , pp. 14
- Miller, D.R.¹

37
- 0002452151
- (1992) Int. J. Mass Spectrom. Ion Processes , vol.113 , pp. 1
- Krishnakumar, E.¹ Srivastava, S.K.²

38
- 0000229942
- (1990) J. Phys. Chem. Ref. Data , vol.19 , pp. 227
- Laher, R.R.¹ Gillmore, F.R.²

39
- 0008380529
- note

40
- 0000822815
- (1998) J. Chem. Phys. , vol.109 , pp. 1758
- Lin, J.J.¹ Hwang, D.W.² Lee, Y.T.³ Yang, X.⁴

41
- 0033862857
- and references therein
- (2000) Acc. Chem. Res. , vol.33 , pp. 563
- Parker, D.H.¹

42
- 0004195004
- (Wiley, New York)
- (1978) Photochemistry of Small Molecules
- Okabe, H.¹

43
- 0008374180
- (1989) J. Phys.: Condens. Matter , vol.1 , pp. 10175
- Sasse, A.G.B.M.¹ Wormeester, H.² Van Der Hoef, M.A.³ Van Silfhout, A.⁴

44
- 0026404493
- (1991) Crit. Rev. Solid State Mater. Sci. , vol.17 , pp. 211
- Ramaker, D.E.¹

45
- 0028550188
- and references therein
- (1994) Surf. Interface Anal. , vol.21 , pp. 771
- Zemek, J.¹ Vystrcil, T.² Lesiak-Orlowska, B.³ Jablonski, A.⁴ Luches, A.⁵

46
- 0001844227
- and references therein
- (1989) J. Vac. Sci. Technol. B , vol.7 , pp. 1
- Hartney, M.A.¹ Hess, D.W.² Soane, D.S.³

47
- 0000972526
- (1994) J. Chem. Phys. , vol.101 , pp. 10185
- Rettner, C.T.¹ Lee, J.²

48
- 0031207119
- (1997) J. Chem. Phys. , vol.107 , pp. 1672
- Wheeler, M.C.¹ Seets, D.C.² Mullins, C.B.³

49
- 0001636241
- (1998) J. Chem. Phys. , vol.109 , pp. 1495
- Teraishi, K.¹ Tabaka, H.² Yamada, A.³ Endou, A.⁴ Gunji, I.⁵ Chatterjee, A.⁶ Kubo, M.⁷ Miyamoto, A.⁸ Nakamura, K.⁹ Kitajima, M.¹⁰

50
- 84914027604
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2854
- Hamers, R.J.¹ Köhler, U.K.²

51
- 0000010085
- and references therein
- (1993) Adv. Phys. , vol.42 , pp. 129
- Boland, J.J.¹

52
- 0026899684
- (1992) Ultramicroscopy , vol.42-44 , pp. 838
- Avouris, Ph.¹ Cahill, D.²

53
- 0026899685
- (1992) Ultramicroscopy , vol.42-44 , pp. 946
- Udagawa, M.¹ Umetani, Y.² Tanaka, H.³ Itoh, M.⁴ Uchiyama, T.⁵ Watanabe, Y.⁶ Yokotsuka, T.⁷ Sumita, I.⁸

54
- 0000135566
- and references therein
- (1999) Annu. Rev. Phys. Chem. , vol.50 , pp. 413
- Wolkow, R.A.¹

55
- 33744712058
- (1990) J. Appl. Phys. , vol.67 , pp. 3693
- Cheng, C.C.¹ Wallace, R.M.² Taylor, P.A.³ Choyke, W.J.⁴ Yates Jr., J.T.⁵

56
- 0032500404
- (1998) Surf. Sci. , vol.415 , pp. 274
- Yi, S.I.¹ Weinberg, W.H.²

57
- 0033099719
- and references therein
- (1999) Surf. Sci. Rep. , vol.33 , pp. 1
- Briggs, G.A.D.¹ Fisher, A.J.²

58
- 0000366377
- (2000) Phys. Rev. Lett. , vol.84 , pp. 939
- Xu, S.H.¹ Keeffe, M.² Yang, Y.³ Chen, C.⁴ Yu, M.⁵ Lapeyre, G.J.⁶ Rotenberg, E.⁷ Denlinger, J.⁸ Yates Jr., J.T.⁹

59
- 0001061772
- (2000) Phys. Rev. B , vol.62 , pp. 5036
- Matsui, F.¹ Yeom, H.W.² Matauda, I.³ Ohta, T.⁴

60
- 0001660661
- and references therein
- (2000) Phys. Rev. B , vol.61 , pp. 16697
- Terborg, R.¹ Baumgärtel, P.² Lindsay, R.³ Schaff, O.⁴ Gießel, T.⁵ Hoeft, J.T.⁶ Polcik, M.⁷ Toomes, R.L.⁸ Kulkarni, S.⁹ Bradshaw, A.M.¹⁰ Woodruff, D.P.¹¹

61
- 0034665191
- (2000) Phys. Chem. Chem. Phys. , vol.2 , pp. 4213
- Lu, X.¹ Lin, M.C.²

62
- 0034250981
- and references therein
- (2000) J. Phys. Chem. B , vol.104 , pp. 8259
- Sorescu, D.C.¹ Jordan, K.D.²

63
- 0032182571
- (1998) Surf. Sci. , vol.416 , pp. 354
- Liu, H.¹ Hamers, R.J.²

64
- 0001115834
- (1997) J. Chem. Phys. , vol.107 , pp. 3981
- Pan, W.¹ Zhu, T.² Yang, W.³

65
- 0029410378
- (1995) Surf. Sci. , vol.341
- Imamura, Y.¹ Morikawa, Y.² Yamasaki, T.³ Nakatsuji, H.⁴

66
- 0032816825
- (1999) Acc. Chem. Res. , vol.32 , pp. 503
- Casavecchia, P.¹ Balucani, N.² Alagia, M.³ Cartechini, L.⁴ Volpi, G.G.⁵

67
- 0001772035
- and references therein
- (1999) Annu. Rev. Phys. Chem. , vol.50 , pp. 347
- Casavecchia, P.¹ Balucani, N.² Volpi, G.G.³

68
- 0008291878
- (1993) J. Chem. Phys. , vol.99 , pp. 9652
- Cohen, L.K.¹

69
- 0001166607
- (1998) Phys. Rev. Lett. , vol.80 , pp. 2000
- Kato, K.¹ Uda, T.² Terakura, K.³

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