SCOPUS 정보 검색 플랫폼

Surface Science

Volumn 411, Issue 1-2, 1998, Pages 163-175

Reactions of atomic deuterium with C2D5Br on Si(100)

(3) Sampson, G M a White, J M b Ekerdt, J G a

a The University of Texas at Austin (United States)

b UNIVERSITY OF TEXAS AT AUSTIN (United States)

Author keywords

Atom solid interactions; Carbon; Deuterium; Hydrogen; Silicon; Thermal desorption spectroscopy

Indexed keywords

ACTIVATION ENERGY; ADSORPTION; AUGER ELECTRON SPECTROSCOPY; BROMINE COMPOUNDS; CHEMISORPTION; DEUTERIUM; ETHYLENE; HYDROGEN; REACTION KINETICS; TEMPERATURE PROGRAMMED DESORPTION;

THERMAL DESORPTION SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 0032141515 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(98)00359-8 Document Type: Article

Times cited : (13)

References (50)

1
- 84957227420
- D. Lubben, R. Tsu, T.R. Bramblett, J.E. Greene, J. Vac. Sci. Technol. A 9 (1991) 3003.
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 3003
- Lubben, D.¹ Tsu, R.² Bramblett, T.R.³ Greene, J.E.⁴

2
- 0025237963
- J. Nishizawa, K. Aoki, S. Suzuki, K. Kikuchi, J. Cryst. Growth 99 (1990) 502.
- (1990) J. Cryst. Growth , vol.99 , pp. 502
- Nishizawa, J.¹ Aoki, K.² Suzuki, S.³ Kikuchi, K.⁴

3
- 0026103549
- Y. Takahashi, T. Urisu, Jpn. J. Appl. Phys. 30 (1991) L209.
- (1991) Jpn. J. Appl. Phys. , vol.30
- Takahashi, Y.¹ Urisu, T.²

4
- 0000771835
- P.A. Coon, P. Gupta, M.L. Wise, S.M. George, J. Vac. Sci. Technol. A 10 (1992) 324.
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 324
- Coon, P.A.¹ Gupta, P.² Wise, M.L.³ George, S.M.⁴

5
- 0007247323
- D.D. Koleske, S.M. Gates, D.B. Beach, J. Appl. Phys. 72 (1992) 4073.
- (1992) J. Appl. Phys. , vol.72 , pp. 4073
- Koleske, D.D.¹ Gates, S.M.² Beach, D.B.³

6
- 0346435830
- M.N. Yoder, Thin Solid Films 225 (1993) 145.
- (1993) Thin Solid Films , vol.225 , pp. 145
- Yoder, M.N.¹

7
- 0026819649
- A.C. Dillon, M.B. Robinson, M.Y. Han, S.M. George, J. Electrochem. Soc. 139 (1992) 537.
- (1992) J. Electrochem. Soc. , vol.139 , pp. 537
- Dillon, A.C.¹ Robinson, M.B.² Han, M.Y.³ George, S.M.⁴

8
- 0000814603
- P.A. Coon, M.L. Wise, A.C. Dillon, M.B. Robinson, S.M. George, J. Vac. Sci. Technol. B 10 (1992) 221.
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 221
- Coon, P.A.¹ Wise, M.L.² Dillon, A.C.³ Robinson, M.B.⁴ George, S.M.⁵

9
- 36449007706
- P.A. Coon, M.L. Wise, S.M. George, J. Chem. Phys. 98 (1993) 7485.
- (1993) J. Chem. Phys. , vol.98 , pp. 7485
- Coon, P.A.¹ Wise, M.L.² George, S.M.³

10
- 0024683641
- Y. Takahashi, H. Ishii, K. Fujinaga, J. Electrochem. Soc. 136 (1989) 1826.
- (1989) J. Electrochem. Soc. , vol.136 , pp. 1826
- Takahashi, Y.¹ Ishii, H.² Fujinaga, K.³

11
- 0346335455
- P.A. Coon, M.L. Wise, Z.H. Walker, S.M. George, Appl. Phys. Lett. 60 (1992) 2002.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2002
- Coon, P.A.¹ Wise, M.L.² Walker, Z.H.³ George, S.M.⁴

12
- 0027578209
- A.C. Dillon, M.B. Robinson, S.M. George, D.A. Roberts, Surf. Sci. 286 (1993) L535.
- (1993) Surf. Sci. , vol.286
- Dillon, A.C.¹ Robinson, M.B.² George, S.M.³ Roberts, D.A.⁴

13
- 0027262692
- C.M. Greenlief, D.A. Klug, W. Du, L.A. Keeling, Mater. Res. Soc. Symp. Proc. 282 (1993) 427.
- (1993) Mater. Res. Soc. Symp. Proc. , vol.282 , pp. 427
- Greenlief, C.M.¹ Klug, D.A.² Du, W.³ Keeling, L.A.⁴

14
- 21344478632
- A. Mahajan, B.K. Kellerman, N.M. Russell, S. Banerjee, A. Campion, J.G. Ekerdt, A. Tasch, J.M. White, D.J. Bonser, J. Vac. Sci. Technol. A 12 (1994) 2265.
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 2265
- Mahajan, A.¹ Kellerman, B.K.² Russell, N.M.³ Banerjee, S.⁴ Campion, A.⁵ Ekerdt, J.G.⁶ Tasch, A.⁷ White, J.M.⁸ Bonser, D.J.⁹

15
- 73349083830
- W. Du, L.A. Keeling, C.M. Greenlief, J. Vac. Sci. Technol. A 12 (1994) 2281.
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 2281
- Du, W.¹ Keeling, L.A.² Greenlief, C.M.³

16
- 44849118044
- B.K. Kellerman, A. Mahajan, N.M. Russell, S. Banerjee, A. Campion, J.G. Ekerdt, A. Tasch, J.M. White, D.J. Bonser, J. Vac. Sci. Technol. A 13 (1995) 1819.
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 1819
- Kellerman, B.K.¹ Mahajan, A.² Russell, N.M.³ Banerjee, S.⁴ Campion, A.⁵ Ekerdt, J.G.⁶ Tasch, A.⁷ White, J.M.⁸ Bonser, D.J.⁹

17
- 0027206984
- D.A. Lapiano-Smith, F.J. Himpsel, L.J. Terminello, Mater. Res. Soc. Symp. Proc. 307 (1993) 155.
- (1993) Mater. Res. Soc. Symp. Proc. , vol.307 , pp. 155
- Lapiano-Smith, D.A.¹ Himpsel, F.J.² Terminello, L.J.³

18
- 0028196439
- J. Schmidt, Ch. Stuhlmann, H. Ibach, Surf. Sci. 302 (1994) 10.
- (1994) Surf. Sci. , vol.302 , pp. 10
- Schmidt, J.¹ Stuhlmann, Ch.² Ibach, H.³

19
- 0028396646
- B. Darlington, M. Foster, A. Campion, Surf. Sci. 304 (1994) L407.
- (1994) Surf. Sci. , vol.304
- Darlington, B.¹ Foster, M.² Campion, A.³

20
- 0000090943
- L.A. Keeling, L. Chen, C.M. Greenlief, A. Mahajan, D. Bonser, Chem. Phys. Lett. 217 (1994) 136.
- (1994) Chem. Phys. Lett. , vol.217 , pp. 136
- Keeling, L.A.¹ Chen, L.² Greenlief, C.M.³ Mahajan, A.⁴ Bonser, D.⁵

21
- 0000836633
- D.A. Klug, C.M. Greenlief, J. Vac. Sci. Technol. A 14 (1996) 1826.
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 1826
- Klug, D.A.¹ Greenlief, C.M.²

22
- 0004290391
- D.D. Koleske, S.M. Gates, J. Chem. Phys. 98 (1993) 5091.
- (1993) J. Chem. Phys. , vol.98 , pp. 5091
- Koleske, D.D.¹ Gates, S.M.²

23
- 36449009153
- D.D. Koleske, S.M. Gates, J. Chem. Phys. 99 (1993) 8218.
- (1993) J. Chem. Phys. , vol.99 , pp. 8218
- Koleske, D.D.¹ Gates, S.M.²

24
- 0001654505
- C.C. Cheng, S.R. Lucas, H. Gutleben, W.J. Choyke, J.T. Yates, Jr., J. Am. Chem. Soc. 114 (1992) 1249.
- (1992) J. Am. Chem. Soc. , vol.114 , pp. 1249
- Cheng, C.C.¹ Lucas, S.R.² Gutleben, H.³ Choyke, W.J.⁴ Yates J.T., Jr.⁵

25
- 0008288301
- J.T. Yates, Jr., C.C. Cheng, Q. Gao, M.L. Colaianni, W.J. Choyke, Thin Solid Films 225 (1993) 150.
- (1993) Thin Solid Films , vol.225 , pp. 150
- Yates J.T., Jr.¹ Cheng, C.C.² Gao, Q.³ Colaianni, M.L.⁴ Choyke, W.J.⁵

26
- 0028517771
- Y. Saito, Appl. Surf. Sci. 81 (1994) 223.
- (1994) Appl. Surf. Sci. , vol.81 , pp. 223
- Saito, Y.¹

27
- 0000856315
- P. Kratzer, J. Chem. Phys. 106 (1997) 6752.
- (1997) J. Chem. Phys. , vol.106 , pp. 6752
- Kratzer, P.¹

28
- 36449009023
- D.D. Koleske, S.M. Gates, J.A. Schultz, J. Chem. Phys. 99 (1993) 5619.
- (1993) J. Chem. Phys. , vol.99 , pp. 5619
- Koleske, D.D.¹ Gates, S.M.² Schultz, J.A.³

29
- 0001229003
- Y. Takamine, A. Namiki, J. Chem. Phys. 106 (1997) 8935.
- (1997) J. Chem. Phys. , vol.106 , pp. 8935
- Takamine, Y.¹ Namiki, A.²

30
- 0000083104
- D.D. Koleske, S.M. Gates, B. Jackson, J. Chem. Phys. 101 (1994) 3301.
- (1994) J. Chem. Phys. , vol.101 , pp. 3301
- Koleske, D.D.¹ Gates, S.M.² Jackson, B.³

31
- 0348212564
- W. Widdra, S.I. Yi, R. Maboudian, G.A.D. Briggs, W.H. Weinberg, Phys. Rev. Lett. 74 (1995) 2074.
- (1995) Phys. Rev. Lett. , vol.74 , pp. 2074
- Widdra, W.¹ Yi, S.I.² Maboudian, R.³ Briggs, G.A.D.⁴ Weinberg, W.H.⁵

32
- 0028062230
- W. Widdra, C. Huang, W.H. Weinberg, Mater. Res. Soc. Symp. Proc. 334 (1994) 99.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.334 , pp. 99
- Widdra, W.¹ Huang, C.² Weinberg, W.H.³

33
- 0347696665
- S.I. Yi, W. Widdra, C. Yan, W.H. Weinberg, J. Vac. Sci. Technol. A 14 (1996) 1822.
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 1822
- Yi, S.I.¹ Widdra, W.² Yan, C.³ Weinberg, W.H.⁴

34
- 0000499114
- W. Widdra, C. Huang, S.I. Yi, W.H. Weinberg, J. Chem. Phys. 105 (1996) 5605.
- (1996) J. Chem. Phys. , vol.105 , pp. 5605
- Widdra, W.¹ Huang, C.² Yi, S.I.³ Weinberg, W.H.⁴

35
- 0028485921
- L.H. Chua, R.B. Jackman, J.S. Foord, Surf. Sci. 315 (1994) 69.
- (1994) Surf. Sci. , vol.315 , pp. 69
- Chua, L.H.¹ Jackman, R.B.² Foord, J.S.³

36
- 0011163076
- Y. Chen, Z. Liu, Q. Zhang, K. Feng, Z. Lin, Appl. Phys. Lett. 67 (1995) 2936.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2936
- Chen, Y.¹ Liu, Z.² Zhang, Q.³ Feng, K.⁴ Lin, Z.⁵

37
- 0000512784
- J. Harris, B. Kasemo, Surf. Sci. 105 (1981) L281.
- (1981) Surf. Sci. , vol.105
- Harris, J.¹ Kasemo, B.²

38
- 3943056593
- E.W. Kuipers, A. Vardi, A. Danon, A. Amirav, Phys. Rev. Lett. 66 (1991) 116.
- (1991) Phys. Rev. Lett. , vol.66 , pp. 116
- Kuipers, E.W.¹ Vardi, A.² Danon, A.³ Amirav, A.⁴

39
- 3843140255
- C.T. Rettner, Phys. Rev. Lett. 69 (1992) 383.
- (1992) Phys. Rev. Lett. , vol.69 , pp. 383
- Rettner, C.T.¹

40
- 0028156977
- C.T. Rettner, D.J. Auerbach, Science 263 (1994) 365.
- (1994) Science , vol.263 , pp. 365
- Rettner, C.T.¹ Auerbach, D.J.²

41
- 0030168110
- C.T. Rettner, D.J. Auerbach, Surf. Sci. 357-358 (1996) 602.
- (1996) Surf. Sci. , vol.357-358 , pp. 602
- Rettner, C.T.¹ Auerbach, D.J.²

42
- 0000672240
- C.T. Rettner, D.J. Auerbach, J. Lee, J. Chem. Phys. 105 (1996) 10115.
- (1996) J. Chem. Phys. , vol.105 , pp. 10115
- Rettner, C.T.¹ Auerbach, D.J.² Lee, J.³

43
- 0001554710
- M. Xi, B.E. Bent, J. Vac. Sci. Technol. B 10 (1992) 2440.
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 2440
- Xi, M.¹ Bent, B.E.²

44
- 0001016135
- A.V. Teplyakov, B.E. Bent, J. Chem. Soc. Faraday Trans. 91 (1995) 3645.
- (1995) J. Chem. Soc. Faraday Trans. , vol.91 , pp. 3645
- Teplyakov, A.V.¹ Bent, B.E.²

45
- 0030169184
- J.-Y. Kim, Y.-S. Park, J. Lee, Surf. Sci. 357-358 (1996) 733.
- (1996) Surf. Sci. , vol.357-358 , pp. 733
- Kim, J.-Y.¹ Park, Y.-S.² Lee, J.³

46
- 0030206763
- Y.-S. Park, J.-Y. Kim, J. Lee, Surf. Sci. 363 (1996) 62.
- (1996) Surf. Sci. , vol.363 , pp. 62
- Park, Y.-S.¹ Kim, J.-Y.² Lee, J.³

47
- 0001337564
- 1 desorption area.
- (1990) J. Chem. Phys. , vol.92 , pp. 5700
- Sinniah, K.¹

48
- 0030380605
- J.A. Kubby, J.J. Boland, Surf. Sci. Rep. 26 (1996) 61.
- (1996) Surf. Sci. Rep. , vol.26 , pp. 61
- Kubby, J.A.¹ Boland, J.J.²

49
- 0000341743
- M.R. Radeke, E.A. Carter, Phys. Rev. B 55 (1997) 4649.
- (1997) Phys. Rev. B , vol.55 , pp. 4649
- Radeke, M.R.¹ Carter, E.A.²

50
- 0007083287
- B.D. Thoms, P.W. Lorraine, W. Ho, J. Chem. Phys. 97 (1992) 2759.
- (1992) J. Chem. Phys. , vol.97 , pp. 2759
- Thoms, B.D.¹ Lorraine, P.W.² Ho, W.³

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