Molecular view of diamond CVD growth

Journal of Electronic Materials

Volumn 26, Issue 9, 1997, Pages 960-965

  Battaile, C C ^a   Srolovitz, D J ^a   Butler, J E ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Chemical vapor deposition (CVD); Computer simulation; Diamond films; Monte Carlo

Indexed keywords

EID: 0001656633     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0231-4     Document Type: Article

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