SCOPUS 정보 검색 플랫폼

Journal of Materials Science

Volumn 34, Issue 1, 1999, Pages 7-20

Atomistic simulation of chemical vapor deposition of (111)-oriented diamond film using a kinetic Monte Carlo method

(2) Grujicic, M a Lai, S G a

a AMRL (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; FILM GROWTH; METHANE; MONTE CARLO METHODS; MORPHOLOGY; POINT DEFECTS; REACTION KINETICS; SURFACE ROUGHNESS; THERMAL EFFECTS;

ATOMISTIC SIMULATION;

DIAMOND FILMS;

EID: 0032665067 PISSN: 00222461 EISSN: None Source Type: Journal
DOI: 10.1023/A:1004488818266 Document Type: Article

Times cited : (48)

References (27)

1
- 0024610549
- K. E. SPEAR, J. Amer. Ceram. Soc. 72 (1989) 171.
- (1989) J. Amer. Ceram. Soc. , vol.72 , pp. 171
- Spear, K.E.¹

2
- 0001394376
- J. E. BUTLER and R. L. WOODIN, Philos. Trans. R. Soc. Lond. A 342 (1993) 209.
- (1993) Philos. Trans. R. Soc. Lond. A , vol.342 , pp. 209
- Butler, J.E.¹ Woodin, R.L.²

3
- 0001777442
- edited by M. A. Prelas, G. Popovici and L. K. Bigelow Dekker, New York
- D. G. GOODWIN and J. E. BUTLER, in "Handbook of Industrial Diamonds and Diamond Films," edited by M. A. Prelas, G. Popovici and L. K. Bigelow (Dekker, New York, 1997), pp. 527-582.
- (1997) Handbook of Industrial Diamonds and Diamond Films , pp. 527-582
- Goodwin, D.G.¹ Butler, J.E.²

4
- 33644817086
- D. W. BRENNER, Phys. Rev. B42 (1990) 9458.
- (1990) Phys. Rev. B , vol.42 , pp. 9458
- Brenner, D.W.¹

5
- 11944260539
- B. J. GARRISON, E. J. DAWNKASKI, D. SRIVASTAVA and D. W. BRENNER, Science 255 (1992) 835.
- (1992) Science , vol.255 , pp. 835
- Garrison, B.J.¹ Dawnkaski, E.J.² Srivastava, D.³ Brenner, D.W.⁴

6
- 33751391808
- D. HUANG and M. FRENKLACH, J. Phys. Chem. 96 (1992) 1868.
- (1992) J. Phys. Chem. , vol.96 , pp. 1868
- Huang, D.¹ Frenklach, M.²

7
- 0004514765
- V. I. GAVRILENKO, Phys. Rev. B 47 (1993) 9556.
- (1993) Phys. Rev. B , vol.47 , pp. 9556
- Gavrilenko, V.I.¹

8
- 0001134966
- Y. L. YANG and M. P. D'EVENLYN, J. Amer. Chem. Soc. 114 (1992) 2796.
- (1992) J. Amer. Chem. Soc. , vol.114 , pp. 2796
- Yang, Y.L.¹ D'Evenlyn, M.P.²

9
- 0000914497
- T. FRAUENHWIM, U. STEPHAN, P. BLAUDECK, D. POREZAG, H.-G. BUSMANN, W. ZIMMERMANN-EDLING and S. LAUER, Phys. Rev. B 48 (1993) 18189.
- (1993) Phys. Rev. B , vol.48 , pp. 18189
- Frauenhwim, T.¹ Stephan, U.² Blaudeck, P.³ Porezag, D.⁴ Busmann, H.-G.⁵ Zimmermann-Edling, W.⁶ Lauer, S.⁷

10
- 0028467932
- Z. JING and J. L. WHITTEN, Surf. Sci. 314 (1994) 300.
- (1994) Surf. Sci. , vol.314 , pp. 300
- Jing, Z.¹ Whitten, J.L.²

11
- 0000297686
- S. SKOKOV, C. S. CARMER, B. WEINER and M. FRENKLACH, Phys. Rev. B 49 (1994) 5662.
- (1994) Phys. Rev. B , vol.49 , pp. 5662
- Skokov, S.¹ Carmer, C.S.² Weiner, B.³ Frenklach, M.⁴

12
- 0004522492
- S. CIRACI and I. P. BATRA, ibid. 15 (1977) 3254.
- (1977) Phys. Rev. B , vol.15 , pp. 3254
- Ciraci, S.¹ Batra, I.P.²

13
- 0001489470
- S. F. YANG, D. A. DRABOLD and J. B. ADAMS, ibid. 48 (1993) 5261.
- (1993) Phys. Rev. B , vol.48 , pp. 5261
- Yang, S.F.¹ Drabold, D.A.² Adams, J.B.³

14
- 0000908301
- B. N. DAVIDSON and W. E. PICKETT, ibid. 49 (1994) 11253.
- (1994) Phys. Rev. B , vol.49 , pp. 11253
- Davidson, B.N.¹ Pickett, W.E.²

15
- 0000629459
- M. FRENKLACH and H. WANG, ibid. 43 (1991) 1520.
- (1991) Phys. Rev. B , vol.43 , pp. 1520
- Frenklach, M.¹ Wang, H.²

16
- 0007041336
- S. J. HARRIS and D. G. GOODWIN, J. Phys. Chem. 97 (1993) 23.
- (1993) J. Phys. Chem. , vol.97 , pp. 23
- Harris, S.J.¹ Goodwin, D.G.²

17
- 33645656760
- M. E. COLTRIN and D. S. DANDY, J. Appl. Phys. 74 (1993) 5803.
- (1993) J. Appl. Phys. , vol.74 , pp. 5803
- Coltrin, M.E.¹ Dandy, D.S.²

18
- 0029358205
- D. S. DANDY and M. E. COLTRIN, J. Mater. Res. 10 (1995) 1993.
- (1995) J. Mater. Res. , vol.10 , pp. 1993
- Dandy, D.S.¹ Coltrin, M.E.²

19
- 0000141647
- M. M. CLARK, L. M. RAFF and H. L. SCOTT, Comput. Phys. 10 (1996) 584.
- (1996) Comput. Phys. , vol.10 , pp. 584
- Clark, M.M.¹ Raff, L.M.² Scott, H.L.³

20
- 0000936247
- E. J. DAWNKASKI, D. SRIVASTAVA and B. J. GARRISON, J. Chem. Phys. 104 (1996) 5997.
- (1996) J. Chem. Phys. , vol.104 , pp. 5997
- Dawnkaski, E.J.¹ Srivastava, D.² Garrison, B.J.³

21
- 0000823633
- C. C. BATTAILE, D. J. SROLOVITZ and J. E. BUTLER, Diamond Relat. Mater. 6 (1991) 1198.
- (1991) Diamond Relat. Mater. , vol.6 , pp. 1198
- Battaile, C.C.¹ Srolovitz, D.J.² Butler, J.E.³

22
- 0001256492
- Idem, J. Appl. Phys. 82 (1997) 6293-6300.
- (1997) J. Appl. Phys. , vol.82 , pp. 6293-6300
- Battaile, C.C.¹ Srolovitz, D.J.² Butler, J.E.³

23
- 0003687245
- Sandia National Laboratories, San Diego, CA
- SURFACE CHEMKIN III User Manual, Sandia National Laboratories, San Diego, CA, 1996.
- (1996) Surface Chemkin III User Manual

24
- 0000407485
- D. S. DANDY and M. E. COLTRIN, J. Appl. Phys. 76 (1994) 3102.
- (1994) J. Appl. Phys. , vol.76 , pp. 3102
- Dandy, D.S.¹ Coltrin, M.E.²

25
- 0031192851
- M. GRUJICIC, S. G. LAI and P. GUMBSCH, Materials Science and Engineering A231 (1997) 151-162.
- (1997) Materials Science and Engineering , vol.A231 , pp. 151-162
- Grujicic, M.¹ Lai, S.G.² Gumbsch, P.³

26
- 0000615669
- R. FLETCHER and C. M. REEVES, Comput. J. 7 (1964) 149.
- (1964) Comput. J. , vol.7 , pp. 149
- Fletcher, R.¹ Reeves, C.M.²

27
- 36449008932
- C. J. CHU, R. H. HAUGE, J. L. MARGRAVE and M. P. D'EVELYN, Appl. Phys. Lett. 61 (1992) 1393.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 1393
- Chu, C.J.¹ Hauge, R.H.² Margrave, J.L.³ D'Evelyn, M.P.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.