Multi-length scale modeling of CVD of diamond: Part I a combined reactor-scale/atomic-scale analysis

Journal of Materials Science

Volumn 35, Issue 21, 2000, Pages 5359-5369

  Grujicic, M ^a   Lai, S G ^a  

^a AMRL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; HEAT TRANSFER; MONTE CARLO METHODS; NUCLEATION;

DEPOSITION SURFACES;

DIAMOND FILMS;

EID: 0034322611     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1004851029978     Document Type: Article

References (36)

1. K. E. SPEAR, J. Amer. Ceram. Soc. 72 (1989) 171.
2. J. E. BUTLER and R. L. WOODIN, Philos. Trans. R. Soc. London, Ser. A 342 (1993) 209.
3. D. G. GOODWIN and J. E. BUTLER, in "Handbook of Industrial Diamonds and Diamond Films," edited by M. A. Prelas, G. Popovici and L. K. Bigelow (Dekker, New York, 1997) p. 527.
4. M. E. COLTRIN, R. J. KEE and G. H. EVANS, J. Electrochem. Soc. 136 (1989) 819.
5. M. E. COLTRIN, R. J. KEE and F. M. RUPLEY, International J. of Chemical Kinetics 23 (1991) 111.
6. D. W. BRENNER, Phys. Rev. B 42 (1990) 9458.
7. B. J. GARRISON, E. J. DAWNKASKI, D. SRIVASTAVA and D. W. BRENNER, Science 255 (1992) 835.
8. D. HUANG and M. FRENKLACH, J. Phys. Chem. 96 (1992) 1868.
9. V. I. GAVRlLENKO, Phys. Rev. 847 (1993) 9556.
10. Y. L. YANG and M. P. D'EVENLYN, J. Amer. Chem. Soc. 114 (1992) 2796.
11. T. FRAUENHWIM, U. STEPHAN, P. BLAUDECK, D. POREZAG, H.-G. BUSMANN, W. ZIMMERMANN-EDLING and S. LAUER, Phys. Rev. 848 (1993) 18189.
12. Z. JING and J. L. WRITTEN, Surf. Sci. 314 (1994) 300.
13. S. SKOKOV, C. S. CARMER, B. WEINER and M. FRENKLACH, Phys. Rev. B 49 (1994) 5662.
14. S. CIRACI and I. P. BATRA, ibid. 15 (1977) 3254.
15. S. F. YANG, D. A. DRABOLD and J. B. ADAMS, ibid. 48 (1993) 5261.
16. B. N. DAVIDSON and W. E. PICKETT, ibid. 49 (1994) 11253.
17. M. M. CLARK, L. M. RAFF and H. L. SCOTT, Comput. Phys. 10 (1996) 584.
18. C. C. BATTAILE, D. J. SROLOVITZ and J. E. BUTLER, J. Appl. Phys. 82 (12), (1997).
19. M. GRUJICIC and S. G. LAI, Journal of Material Science 34(il) (1999) 7.
20. Idem., Journal of Material Science, submitted.
21. G. EVANS and R. GREIF, J. Heat Trans. ASME 109 (1987) 928.
22. T. VON KARMAN and A. ANGEW, Math. Mech. 1 (1921) 233. Also available as NACA-TM-1092.
23. F. M. WHITE, "Viscous Fluid Flow" (McGraw-Hill, New York, 1974).
24. H. SCHHLICHTING, "Boundary Layer Theory," 7th ed. (McGraw-Hill, New York, 1979).
25. W. G. COCHRAN. Proc. Cambridge Phil. Soc. 30 (1934) 365.
26. E. M. SPARROW and J. L. GREGG, J. Heat Trans. ASME 82 (1960) 294.
27. D. R. OLANDER, I. and E. C. Fund. 6 (1967) 178.
28. Idem., ibid. 6 (1967) 188.
29. R. POLLARD and J. NEWMAN, J. Electrochem. Soc. 127 (1980) 744.
30. M. L. HITCHMAN, B. J. CURTIS, H. R. BRUNNER and V. EICHENBERGER, "Physicochemical Hydradynamics, Vol. 2," edited by D. B. Spalding (Advanced Publications, London, 1977).
31. G. EVANS and R. GREIF, Num. Heat Transfer 12 (1987) 243.
32. M. E. COLTRIN and D. S. DANDY, J. Appl. Phys. 74(9) (1993) 5803.
33. R. J. KEE, F. M. RUPLEY and J. A. MILLER, Sandia National Laboratories Report SAND89-8009 (1989).
34. C. WILD, P. KOIDL, W. MÜLLER-SEBERT, H. WALCHER, R. KOHL, N. HERRES and R. LOCHER, Diamond and Related Materials 2 (1993) 158.
35. C. C. BATTAILE.D. J. SROLOVITZ and J. E. BUTLER, J. of Elec. Mater. 26(9) 1997.
36. C. J. CHU, R. H. HAUGE, J. L. MARGRAVE and M. P. D'EVELYN, Appl. Phys. Lett. 61 (1992) 1393.