Monolithic fabrication of electroplated solenoid inductors using three-dimensional photolithography of a thick photoresist

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12 B, 1998, Pages 7081-7085

  Yoon, Jun Bo ^a   Han, Chul Hi ^a   Yoon, Euisik ^a   Kim, Choong Ki ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

3D micro coil; 3D patterning; Electroplating; Integrated inductor; Magnetic core integration; Microfabrication; Micromachining; Photolithography; Solenoid inductor; Thick photoresist

Indexed keywords

EID: 0001373380     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.7081     Document Type: Article

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