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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4283-4290

Pre-sheaths and turbulent flow in electronegative plasmas

(1) Vitello, Peter a

a LAWRENCE LIVERMORE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY LAYERS; CHLORINE; COMPUTER SIMULATION; ELECTRON SCATTERING; NEGATIVE IONS; PLASMA DENSITY; PLASMA SHEATHS; PLASMA SIMULATION; PLASMA STABILITY; POSITIVE IONS; TURBULENT FLOW; ULSI CIRCUITS;

CHLORINE DISCHARGE; COULOMB SCATTERING; ELECTRONEGATIVE PLASMA; HIGH DENSITY PLASMA; INDUCTIVELY COUPLED PLASMA;

PLASMA SOURCES;

EID: 0033157511 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.38.4283 Document Type: Article

Times cited : (9)

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